Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study on the Microstructure and Properties of SCT Thin Film

SCT 박막의 미세구조 및 특성에 관한 연구

  • So, Byung-Moon (Dept. of Electrical Engineering, Iksan National College) ;
  • Bang, Jun-Ho (Dept. of Electrical Engineering, Iksan National College) ;
  • Kim, Jin-Sa (Dept. of Electrical Engineering, Kwang Woon University)
  • Published : 2005.03.01
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Abstract

The ($Sr_{1-x}Ca_{x})Ti_{3}$(SCT) thin film are deposited on Pt-coated electrode (Pt/TiN/$SiO_{2}$/Si) using RF sputtering method. The maximum dielectric constant of SCT thin film is obtained by annealing at 600[$^{\circ}C$]. The temperature properties of the dielectric loss have a value within 0.02 in temperature lunges of -80 $\∼$ +90[$^{\circ}C$]). The capacitance characteristics had a stable value within ${\pm}4\%$. The drastic decrease of dielectric constant and increase of dielectric loss in SCT thin films is observed above 200[kHz).

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