Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
권호 표지

Analysis of Heat and Vibration of Super-Precision Linear Motors

초정밀 선형 모터의 열$\cdot$진동 분석

  • Lee Woo Young (Korea University of Technology and Education School of Mechanical Engineering) ;
  • Rim Kyung Hwa (Korea University of Technology and Education School of Mechatronics Engineering) ;
  • Seol Jin Soo (Korea University of Technology and Education Graduate School, Mechatronics Engineering) ;
  • Kim Hyun Chul (Korea University of Technology and Education Graduate School, Mechanical Engineering)
  • 이우영 (한국기술교육대학교 기계정보공학부) ;
  • 임경화 (한국기술교육대학교 메카트로닉스공학부) ;
  • 설진수 (한국기술교육대학교 대학원 메카트로닉스공학과) ;
  • 김현철 (한국기술교육대학교 대학원 기계공학과)
  • Published : 2005.03.01
Download PDF
⟨ Previous Next ⟩

Abstract

Linear motor can be directly applied to the system needed linear motions without rotary motions. To control high-speed and high-resolution, the development of the linear motors is recently required in the high-integrated and speed process industry This paper presents thermal and vibration analyses as well as measurement standards of the newly developed linear motors through analyzing the thermal behaviors and vibration characteristics of the advanced products. The thermal measurements are conducted for comparing the developed linear motor with the advanced linear motor and the Finite Volume Method(FVM) is used to identify the measurement results. And then the vibration measurement are carried out in the developed and advanced linear motors with respect to the speed. To identify the measurement results, the Finite Element Method is utilized in the developed and advanced linear motors, respectively. The FVM, FEM, and experiments make it possible to understand these characteristics. The improvement is suggested through their results conducted experiment and analyses.

Keywords