Journal of Surface Science and Engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Structure and Mechanical Characteristics of ZrCrAIN Nanocomposite Thin Films by CFUBMS

CFUBMS을 이용한 ZrCrAIN 나노복합 박막의 구조와 기계적 특성

  • Kim Youn J. (Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology) ;
  • Lee Ho Y. (Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology) ;
  • Shin Kyung S. (Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology) ;
  • Jung Woo S. (Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology) ;
  • Han Jeon G. (Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology)
  • 김연준 (성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터) ;
  • 이호영 (성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터) ;
  • 신경식 (성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터) ;
  • 정우성 (성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터) ;
  • 한전건 (성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터)
  • Published : 2005.10.01
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Abstract

The quaternary ZrCrAIN nanocomposite thin films are synthesized by Closed-Field Unbalanced Magnetron Sputtering (CFUBMS). Microstructure and mechanical properties of ZrCrAIN nanocomposite thin films are studied. Grain refinement of ZrCrAIN nanocomposite thin film is occurred by controlling $N_{2}$ partial pressure. Maximum hardness value according to the various $N_{2}$ partial pressures is obtained at 45 GPa. It is also conformed that critical value of the grain size (d) needs to achieve the maximum hardness.

Keywords

References

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