정보저장시스템학회논문집 (Transactions of the Society of Information Storage Systems)
- 제1권1호
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- Pages.73-77
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- 2005
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- 1738-6845(pISSN)
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- 2288-2022(eISSN)
Silicon Nitride Cantilever Array Integrated with Si Heaters and Piezoelectric Sensors for Probe-based Data Storage
- Nam Hyo-Jin (LG Electronics Institute of Technology) ;
- Kim Young-Sik (LG Electronics Institute of Technology) ;
- Lee Caroline Sunyong (LG Electronics Institute of Technology) ;
- Jin Won-Hyeog (LG Electronics Institute of Technology) ;
- Jang Seong-Soo (LG Electronics Institute of Technology) ;
- Cho Il-Joo (LG Electronics Institute of Technology) ;
- Bu Jong-Uk (LG Electronics Institute of Technology)
- 발행 : 2005.09.01
초록
In this paper, a new silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been firstly developed to improve the uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric SPM(scanning probe microscopy) -based data storages. This nitride cantilever shows thickness uniformity less than