한국소음진동공학회논문집 (Transactions of the Korean Society for Noise and Vibration Engineering)

  • 제15권11호
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  • Pages.1295-1302
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  • 2005
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  • 1598-2785(pISSN)
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  • 2287-5476(eISSN)
한국소음진동공학회 (The Korean Society for Noise and Vibration Engineering)
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주사 현미경용 평면 스캐너 Part 2 : 정 · 동 특성 평가

A Flexure Guided Planar Scanner for Scanning Probe Microscope ; Part 2. Evaluation of Static and Dynamic Properties

  • Published : 2005.11.01
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Abstract

This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.

Keywords

References

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  1. An education model of a nano-positioning system for mechanical engineers vol.20, pp.10, 2006, https://doi.org/10.1007/BF02916274