Journal of information and communication convergence engineering

  • 제3권3호
  • /
  • Pages.137-141
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  • 2005
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  • 2234-8255(pISSN)
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  • 2234-8883(eISSN)
한국정보통신학회 (The Korea Institute of Information and Commucation Engineering)
권호 표지

Comparison of Resonance Characteristics in FBAR Devices by Thermal Treatments

  • Mai Linh (School of Engineering, Information and Communications University (ICU)) ;
  • Song Hae-il (School of Engineering, Information and Communications University (ICU)) ;
  • Yoon Giwan (Information and Communications University (ICU))
  • 발행 : 2005.11.01
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초록

The paper presents some methods to improve characteristics of film bulk acoustic resonator (FBAR) devices. The FBAR devices were fabricated on Bragg reflectors. Thermal treatments were done by sintering and/or annealing processes. The measurement showed a considerable improvement of return loss $(S_{11})$ and quality factor $(Q_{s/p}).$ These thermal treatment techniques seem very promising for enhancing FBAR resonance performance.

키워드

참고문헌

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