Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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Fabrication of Micro Mirror Array for Small Form Factor Optical Pick-up by Micro UV-Molding

마이크로 UV성형을 통한 초소형 광픽업용 마이크로 미러 어레이 제작

  • Published : 2005.08.01
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Abstract

Wafer scale micro mirror array with high surface quality for small form factor (SFF) optical pick-up was fabricated by micro UV-molding. To replicate micro mirror array for SFF optical pick-up, a high- precision mold was fabricated using micro-machining technology. Wafer scale micro mirror array was UV-molded using the mold and then the process was optimized experimentally. The surface flatness and roughness of UV-molded micro mirror array were measured by white light scanning interferomety system and analyzed the transcribing characteristics. Finally, the measured flatness of UV-molded micro mirror away for SFF optical pick-up, which was fabricated in the optimum processing condition, was less than 70nm.

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References

  1. Carrola Strandman, 1995, Fabrication of $45^{\circ}$ mirrors together with well-defined V-grooves using wet anisotrophic etching of silicon, J. Microelectromechanical Syst., 4(4), pp. 219-2162
  2. Sung. Kim, Jang-Joo. Kim, 2004, Fabrication of multimode polymeric waveguides and micromirrors using deep X-ray lithography, IEEE photonics technology letters, Vol. 16, pp. 798-800 https://doi.org/10.1109/LPT.2004.823694
  3. T. Satoh, A. Ichimura, O. Mikami, S. Tomaru, M. Hikita, T. Uchida, 1998, Coupling of spot-size converted laser diode to polymeric waveguide with 45-degree micro reflection mirror for optical surface mount technology, IEMT/IMC Symposium, pp. 114-117
  4. 김종성, 강신일, 2000, 광디스크 기판 성형시 발생하는 복굴절의 최소화를 위한 이론적 연구, 한국소성가공학회지, 제 9 권, 제 2 호, pp. 103-111
  5. S. Kang, 2004, Replication Technology for Micro/Nano Optical Components, Japanese Journal of Applied Physics, Vol. 43, No. 8B, pp. 5706-5716 https://doi.org/10.1143/JJAP.43.5706
  6. 이명복, 손진승, 김해성, 조은형, 2005, Fabrication of micro mirror array for integrated optical pickup, 한국광학회 동계학술대회, pp. 314-315
  7. 김석민, 김동묵, 강신일, 전병희, 2002, 전사성 향상을 위한 마이크로 UV 성형 공정 최적화, 한국소성가공학회 추계학술대회, pp. 343-346