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Micro/Nano Adhesion and Friction Properties of SAMs with Different Head and Functional Group according to the Coating Methods

코팅 방법에 따른 이종 SAMs의 관능기별 마이크로/나노 응착 및 마찰 특성

  • 윤의성 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 오현진 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 한흥구 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 공호성 (한국과학기술연구원 트라이볼로지 연구센터)
  • Published : 2005.06.01

Abstract

Micro/nano adhesion and friction properties of self-assembled monolayers (SAMs) with different head- and end-group were experimentally studied according to the coating methods. Various kinds of SAM having different spacer chains (C10 and C18), head-group and end-group were deposited onto Si-wafer by dipping and chemical vapour deposition (CVD) methods under atmospheric pressure, where the deposited SAM resulted in the hydrophobic nature. The adhesion and friction properties between tip and SAM surfaces under nano scale applied load were measured using an atomic force microscope (AFM) and also those under micro scale applied load were measured using a ball-on-flat type micro-tribotester. Surface roughness and water contact angles were measured with SPM (scanning probe microscope) and contact anglemeter respectively. Results showed that water contact angles of SAMs with the end-group of fluorine show higher relatively than those of hydrogen. SAMs with the end-group of fluorine show lower nano-adhesion but higher micro/nanofriction than those with hydrogen. Water contact angles of SAMs coated by CVD method show high values compared to those by dipping method. SAMs coated by CVD method show the increase of nano-adhesion but the decrease of nano-friction. Nano-adhesion and friction mechanism of SAMs with different end-group was proposed in a view of size of fluorocarbon molecule.

Keywords

References

  1. Tai, Y. C., Fan, L. S. and Muller, R.S., 'IC-Processed Micro-Motors: Design, Technology and Testing,' Proc. IEEE Micro Electro Mechanical Systems, pp. 1-6, 1989
  2. Deng, K., Collins, R. J., Mehregany, M. and Sukenik, C.N., 'Performance Impact of Monolayer Coatings of Polysilicon Micromotors,' Proc. MEMS 95, Amsterdam, Netherlands, Jan-Feb
  3. Maboudian, R., Ashurst, W. R. and Carraro, C., 'Self-assembled monolayers as anti-stiction coatings for MEMS,' Sensors and Actuators A: Physical, 82, 219-223, 2000 https://doi.org/10.1016/S0924-4247(99)00337-4
  4. Maboudian, R., 'Surface processes in MEMS technology,' Surface Science Reports, Vol. 30, pp. 207-269, 1998 https://doi.org/10.1016/S0167-5729(97)00014-9
  5. Carraro, C., Yauw, O. W., Sung, M. M. and Maboudian, R., 'Observation of Three Growth Mechanism in Self-Assembled Monolayers,' The Journal of Physical Chemistry B, Vol. 102, No. 23, 1998
  6. Kluth, G. J., Sander, M., Sung, M. M. and Maboudian, R., 'Study of the desorption mechanism of alkylsiloxane self-assembled monolayers through isotopic labeling and high resolution electron energy-loss spectroscopy experiments,' J. Vac. Sci. Technol. A, Vol. 16, No. 3, pp. 932-936, 1998 https://doi.org/10.1116/1.581214
  7. Kluth, G. J., Sung, M. M. and Maboudian, R., 'Interaction of H(D) Atoms with Octadecylsiloxane Self-Assembled Monolayers on the Si(100) Surface', Langmuir, Vol. 13, pp. 6491-6496, 1997 https://doi.org/10.1021/la970641g
  8. Kato, K., Koide, H. and Umehara, N., 'Micro-Wear Properties of Carbon Nitride Coatings,' Wear, Vol. 238, pp.40-44, 2000 https://doi.org/10.1016/S0043-1648(99)00338-5
  9. 오현진, 윤의성, 한흥구, 공호성, 장경영, 'IBAD 방법으로 코팅된 PTFE 박막의 마이크로/나노 응착 및 마찰 특성,' 제 36회 한국윤활학회 춘계학술대회 논문집, pp. 55-62, 2003
  10. Ando, Y. and Ino, J., 'Friction and pull-off force on silicon surface modified by FIB,' Sensors and Actuators A, Vol. 57, pp. 83-89, 1996 https://doi.org/10.1016/S0924-4247(97)80098-2
  11. Ando, Y. and Ino, J., 'Friction and pull-off forces on submicron-size asperities,' Wear, Vol. 216, pp. 115-122, 1998 https://doi.org/10.1016/S0043-1648(97)00158-0
  12. Maboudian, R. and Roger, T. Howe, 'Critical Review: Adhesion in surface micromechanical structures,' J. Vac. Sci. Technol. B, 15 (1), pp. 1-20, 1997 https://doi.org/10.1116/1.589247
  13. Hozumi, Atsushi, Ushiyama, Kazuya, Sugimura, Hiroyuki and Takai, Osamu, 'Fluoroalkylsilane Monolayers Formed by Chemical Vapor Surface Modification on Hydroxylated Oxide Surfaces,' Langmuir, Vol. 15, pp. 7600-7604, 1999 https://doi.org/10.1021/la9809067
  14. Ashurst, W. Robert, Carraro, C. and Maboudian, 'Vapor Phase Anti-Stiction Coatings for MEMS,' IEEE Transactions on Device and Materials Reliability, Vol. 3, No. 4, pp. 173-178, 2004 https://doi.org/10.1109/TDMR.2003.821540
  15. 윤의성, 박지현, 양승호, 공호성, 'SPM을 이용한 접촉조건 변화에 따른 미소응착 특성 연구', 한국윤활학회지, 제17권, 제3호, pp. 191-197, 2001
  16. 윤의성, 박지현, 양승호, 한흥구, 공호성, 'OTS SAM의 미소응착 특성에 관한 실험적 연구,' 한국윤활학회지, 제17권, 제4호, pp. 276-282, 2001
  17. 윤의성, 박지현, 양승호, 공호성, 장경영 東IBAD로 표면개질된 설리콘 표면의 나노 트라이볼로지적 특성,' 한국윤활학회지, 제18권, 1호, pp. 1-8, 2002
  18. Overney, R. M., Meyer, E., Frommer, J., Brodbeck, D., Luthi, R., Howald, L., Guntherodt, H.-J., Fujihira, M., Takano, H. and Gotoh, Y., 'Friction measurements on phase-separated thin films with a modified atomic force microscope,' Nature, Vol. 359, pp. 133-135, 1992 https://doi.org/10.1038/359133a0
  19. Kim, Hyun I., Koini, Thomas, Lee, T. Randall, Perry and Scott S., 'Systematic Studies of the Frictional Properties of Fluorinated Monolayers with Atomic Force Microscopy: Comparison of $CF_{3}\;^-$ and $CH_{3}$ Terminated Films,' Langmuir, Vol. 13, pp. 7192-7196, 1997 https://doi.org/10.1021/la970539j