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A study on the fabrication of periodically poled Ti:LiNbO3 (PPLN) by the control of charge

전하량제어에 의한 주기적 분극반전 Ti:LiNbO3 (PPLN) 제작 공정에 관한 연구

  • Kim, Won-Joung (Dept. of Electronic & Computer Engineering, Graduate School, Hong-ik University) ;
  • Jung, Hong-Sik (Dept. of Electronic & Computer Engineering, Graduate School, Hong-ik University) ;
  • Lee, Han-Young (NANO Scale Quantum Devices Research Center, KETI)
  • 김원정 (홍익대학교, 대학원, 전자전산공학과) ;
  • 정홍식 (홍익대학교, 대학원, 전자전산공학과) ;
  • 이한영 (전자부품연구원, 나노광전소자연구센터)
  • Published : 2005.08.01

Abstract

A fabrication process of periodic electric field assisted poling of Ti-diffused channel waveguides in LiNbO3 (Ti:PPLN) has been developed and improved using a periodic 180o phase inversion along the z-axis. The zig for poling inversion and the Labview program of charge control have been devised. Pulse high voltage and duty cycle were adjusted based on the estimated charge required for poling inversion. Monitoring the change of leakage current under applied voltage less than the coercive voltage also minimized a breakdown.

Ti 확산 리튬나오베이트 채널 광도파로의 z-축 분극을 주기적으로 $180^{\circ}$ 위상 변화시키는 Ti:PPLN 제작 공정을 검토하고, 개선하였다. 분극반전 공정에 적합한 지그와 Labview 프로그램을 이용하여 전하량 제어시스템을 고안하였다. 분극반전에 필요한 전하량으로부터 분극에 적절한 고전압 펄스와 duty-cycle을 조절하였으며, 분극에 필요한 임계 전압 보다 작은 전압을 인가한 상태에서 누설전류의 변화를 관찰하여 절연파괴 현상을 또한 최소화하였다.

Keywords

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