한국소음진동공학회논문집 (Transactions of the Korean Society for Noise and Vibration Engineering)

  • 제15권8호
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  • Pages.931-938
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  • 2005
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  • 1598-2785(pISSN)
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  • 2287-5476(eISSN)
한국소음진동공학회 (The Korean Society for Noise and Vibration Engineering)
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랜덤 제조 오차를 고려한 모드 편재계수를 최소화하는 반복 배열 마이크로 공진기의 최적설계

Design of MEMS Resonator Array for Minimization of Mode Localization Factor Subject to Random Fabrication Error

  • 김욱태 (삼성전자 메카트로닉스 연구소) ;
  • 이종원 (한국과학기술원 기계공학과)
  • 발행 : 2005.08.01
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초록

This paper presents a robust optimal design method for a periodic structure type of MEMS resonator that is vulnerable to mode localization. The robust configuration of such a MEMS resonator to fabrication error is implemented by changing the regularity of periodic structure For the mathematical convenience, the MEMS resonator is first modeled as a multi-pendulum system. The index representing the measure of mode variation is then introduced using the perturbation method and the concept of modal assurance criterion. Finally, the optimal intentional mistuning, minimizing the expectation of the irregularity measure for each substructure, is determined for the normal distributed fabrication error and its robustness in the design of MEMS resonator to the fabrication error is demonstrated with numerical examples.

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참고문헌

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