Transactions of the Korean Society for Noise and Vibration Engineering (한국소음진동공학회논문집)

The Korean Society for Noise and Vibration Engineering (한국소음진동공학회)
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Design of MEMS Resonator Array for Minimization of Mode Localization Factor Subject to Random Fabrication Error

랜덤 제조 오차를 고려한 모드 편재계수를 최소화하는 반복 배열 마이크로 공진기의 최적설계

  • 김욱태 (삼성전자 메카트로닉스 연구소) ;
  • 이종원 (한국과학기술원 기계공학과)
  • Published : 2005.08.01
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Abstract

This paper presents a robust optimal design method for a periodic structure type of MEMS resonator that is vulnerable to mode localization. The robust configuration of such a MEMS resonator to fabrication error is implemented by changing the regularity of periodic structure For the mathematical convenience, the MEMS resonator is first modeled as a multi-pendulum system. The index representing the measure of mode variation is then introduced using the perturbation method and the concept of modal assurance criterion. Finally, the optimal intentional mistuning, minimizing the expectation of the irregularity measure for each substructure, is determined for the normal distributed fabrication error and its robustness in the design of MEMS resonator to the fabrication error is demonstrated with numerical examples.

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References

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