Journal of the Korea Institute of Information and Communication Engineering (한국정보통신학회논문지)

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Fatigue Characteristics of PLZT(x/30/70) Thin Films with Various La Concentrations

La 농도에 따른 PLZT(x/30/70) 박막의 피로 특성에 관한 연구

  • 강성준 (여수대학교 반도체학과) ;
  • 정윤근 (여수대학교 반도체학과) ;
  • 정양희 (여수대학교 전기공학부)
  • Published : 2005.08.01
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Abstract

The effects of La concentration in PLZT (z/30/70) thin film prepared by sol-gel method are investigated for the NVFRAM application. As the La concentration increases, the dielectric constants at 10 kHz increase from 450 to 600, while the loss tangent and the leakage current density at 100 kV/cm decrease from 0.075 to 0.025 and from $5.83{\times}10^{-7}\;to\;1.38{\times}10^{-7}\;A/cm^2,$ respectively. In the results of hysteresis loops measured at 175 kV/cm, the remanent polarization and the coercive field decrease from 20.8 to $10.5{\mu}C/cm^2$ and from 54.48 to 32.12 kV/cm, respectively, with the increase of La concentration from 0 to $10mol\%.$ After applying for $10^9$ cycles of square pulses with ${\pm}5V$ height, the remanent polarization of the PLZT (10/30/70) thin film decreases $40\%$ from the initial state, while that of the PLZT (10/30/70) thin film decreases $64\%.$.

비휘발성 메모리 소자로의 응용의 관점에서, sol-gel 방법으로 PLZT(x/30/70) 박막을 제작하여 La 농도에 따른 구조적 및 전기적 특성을 조사하였다 La 농도가 0 에서 $10mol\%$ 로 증가함에 따라, PLZT 박막의 유전상수는 450 에서 600 으로 증가된 반면, 유전손실과 100kV/cm에서 측정한 누설전류밀도는 각각 0.075 에서 0.025 로 $5.83{\times}10^{-7}$에서 $1.38{\times}10^{-7}A/cm^2$ 으로 감소되었다. 175kV/cm 에서 측정한 PLZT 박막의 이력곡선을 측정한 결과, La 농도가 0 에서 $10mol\%$ 로 증가함에 따라 박막의 잔류분극과 항전계는 각각 20.8에서 $10.5{\mu}C/cm^2,$ 54.48 에서 32.12kV/cm 로 감소되었다. PLZT 박막에 ${\pm}5V$ 의 사각펄스를 $10^9$ 회 인가하여 피로특성을 측정한 결과, La 농도가 증가함에 따라 초기 분극값의 감소가 64 에서 $40\%$ 로 개선됨을 확인할 수 있었다.

Keywords

References

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