The Journal of Korean Institute of Electromagnetic Engineering and Science (한국전자파학회논문지)

The Korean Institute of Electromagnetic Engineering and Science (한국전자파학회)
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Studies on Fabrication of Novel Micromachined SIR. Bandpass Filter Using DAMLs

DAML 구조를 이용한 새로운 형태의 SIR대역 통과 여파기의 설계 및 제작

  • Baek Tae-Jong (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University) ;
  • Ko Baek-Seok (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University) ;
  • Kim Sung-Chan (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University) ;
  • Lim Byeong-Ok (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University) ;
  • An Dan (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University) ;
  • Kim Soon=Koo (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University) ;
  • Shin Dong-Hoon (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University) ;
  • Rhee Jin-Koo (Millimeter-wave INnovation Technology Research Center, MINT, Dongguk University)
  • 백태종 (동국대학교 밀리미터파 신기술연구센터) ;
  • 고백석 (동국대학교 밀리미터파 신기술연구센터) ;
  • 김성찬 (동국대학교 밀리미터파 신기술연구센터) ;
  • 임병옥 (동국대학교 밀리미터파 신기술연구센터) ;
  • 안단 (동국대학교 밀리미터파 신기술연구센터) ;
  • 김순구 (동국대학교 밀리미터파 신기술연구센터) ;
  • 신동훈 (동국대학교 밀리미터파 신기술연구센터) ;
  • 이진구 (동국대학교 밀리미터파 신기술연구센터)
  • Published : 2005.07.01
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Abstract

In this paper, we proposed a new type SIR bandpass filter using DAMLs. This filter is consisted of 2 layers with MEMS resonator layer and CPW feed line. DAMLs ring resonator is elevated with $10{\mu}m$ height from GaAs substrate. Using MEMS processing, we are able to realize SIR bandpass filter easily. Furthermore it is useful to integrate on conventional MMICs because it has CPW interfaces and ring resonator is isolated from substrate by air-gap. We optimized and measured the results that $S_{21}$ attenuation at rejected band is over 15 dB, insertion loss is inside the limit of 3 dB, and relative bandwidth is about $10\%$ at 60 GHz.

본 논문에서 우리는 DAML(Dielectric Air-gapped supported Microstrip Line) 구조를 이용하여 새로운 구조의 SIR대역 통과 여파기를 설계 제작하였다. 제작된 SIR대역 통과 여파기는 MIM capacitor를 커플링 포트로써 사용함으로 DAML구조를 이용하여 쉽게 제작될 수 있다. 더욱이 이러한 구조는 CPW interfaces를 가지고 있고 DAML구조의 링 공진기는 기판으로부터 $10{\mu}m$높이로 분리되어 있기 때문에 일반적인 평면 구조의 MMICs와 집적하기 유리하다. 제작된 필터의 측정 결과, 60 GHz에서 $10\%$의 대역폭, 60.7 GHz에서 2.84 dB의 삽입 손실, 56 GHz에서 18.4 dB의 감쇠 특성, 60 GHz에서 23 dB의 반사 특성을 얻었다.

Keywords

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