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Antenna Dependency of Mode Transition in Cylindrical ICP Light-source

원통형 ICP 광원 모드변환의 안테나 의존성

  • 양종경 (원광대학교 전기전자정보통신공학) ;
  • 백광현 (원광대학교 전기전자정보통신공학) ;
  • 이종찬 ((주)금호전기) ;
  • 박대희 (원광대학교 전기전자정보통신공학) ;
  • 윤양웅 (원광대학교 전기전자정보통신공학)
  • Published : 2005.08.01

Abstract

In this paper, we designed the cylindrical type light source that had a electromagnetic principle of inductively coupled plasma, and measured its electrical-optical properties. Using the principle of transformer, electrically equivalent circuit of cylindrical type light source was analyzed. According to the parameters of electromagnetic induction which were diameter of coil with $0.3\~1.2\;mm{\Phi}$, number of turns with $4\~12$ turns, distance with $40\~120$ mm and RF power with $10\~150$ W, the electrical and optical properties were measured. When diameter of coil was $0.3\;mm{\Phi}$, number of turns was 8 turns and distance was 40 mm, the highest brightness of 29,730 $cd/m^2$ was shown with RF power 150 W. The relationship between electromagnetic induction and plasma discharges was shown by mode transition from E-mode to H-mode.

Keywords

References

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