참고문헌
- U. Dibbern, 'A substrate for thin-film gas sensors in microelectronic technology', Sensors and Actuators B, Vol. 2, Iss. 1, p. 63, 1990
- E. Yoon, 'An integrated mass flow sensor with on-chip CMOS interface ciruitry', IEEE Transactions on Electron Devices, Vol. 39, No. 6, p. 1376, 1992
- J. W. Gardner, A. Pike, N. F. De Rooij, M. Koudelka-Hep, P. A. Clerc, A. Hierlemann, and W. Gopel, 'Integrated array sensor for detection organic solvents', Sensors and Actuators B, Vol. 26, Iss. 1-3, p. 135, 1995 https://doi.org/10.1016/0925-4005(94)01546-T
- V. V. Luchinin, 'Microtechonlogy and equipment for manugactruing SiC-based sensors of physical values for extreme operation condition', Proceeding of 7th Conference on Sensor Technology, p. 30, 1996
- M. A. Gajda and H. Ahmed, 'Applications of thermal silicon sensors on membranes', Sensors and Actuators A, Vol. 49, Iss. 1-2, p. 1, 1995 https://doi.org/10.1016/0924-4247(96)80025-2
- W. Y. Chung, C. H. Shim, D. D. Lee, and S. D. Choi, 'Tin oxide microsensor for LPG monitoring', Sensors and Actuators B, Vol. 20, Iss. 2-3, p. 139, 1994
-
A. Banovec and A. Zalar, 'Investigation of sliding contact resistance of Ni-Cr/Au and Ni-Cr/
$Au-SiO_2$ thin resistive films', Thin Solid Films, Vol. 164, p. 129, 1988 - A. Peled, J. Farhadyan, Y. Zloof, and V. Baranauskas, 'The midrange and high temperature dependence of vacuum deposited NiCr thin film resistors', Vacuum, Vol. 45, Iss. 1, p. 5, 1994
- N. G. Dhere and D. G. Vaoide, 'Composition and temperature coefficient of resistance of Ni-Cr thin films', Thin Solid Films, Vol. 59, Iss. 1, p. 33, 1979
- M. I. Birjega, C. A. Constantin, I. TH. Florescu, and C. Sarbu, 'Crystallization of amorphous sputtered 55 %Cr-45 %Ni thin films', Thin Solid Films, Vol. 92, Iss. 4, p. 315, 1982 https://doi.org/10.1016/0040-6090(82)90154-7
- S. Hofmann and A. Zalar, 'Correlation between electrical properties and AES concentration-depth profiles of NiCr thin films', Thin Solid Films, Vol. 39, p. 219, 1976
- 권용, 김남훈, 최동유, 이우선, 서용진, 박진성, 'DC 마그네트론 스퍼터링 NiCr 박막의 열처리 조건에 따른 미세구조 및 표면특성', 전기전자재료학회논문지, 18권,6호, p. 554, 2005
- 김병희, '성문 이화학사전', 한국사전연구사, p. 573, 1995
-
J. H. Ryu, N. H. Kim, H. S. Kim, G. Y. Yeom, E. G. Chang, and C. I. Kim, 'Roles of
$N_2$ Gas in Etching of Platinum by Inductively Coupled Ar/$CI_2$ $N_2$ Plasmas', Journal of Vacuum Science & Technology A, Vol. 18, No. 4, p. 1377, 2000