Journal of Mechanical Science and Technology

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지

Design and Fabrication of a Micro PZT Cantilever Array Actuator for Applications in Fluidic Systems

  • Kim Hyonse (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • In Chihyun (MEMS Division, DAEWOO Electronics Corp.) ;
  • Yoon Gilho (Department of Mechanical Engineering, Solid Mechanics, Nils Koppels Alle, DTU) ;
  • Kim Jongwon (School of Mechanical and Aerospace Engineering, Seoul National University)
  • Published : 2005.08.01
Download PDF
⟨ Previous Next ⟩

Abstract

In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived and the actuating behavior predicted. The calculated value of the tip deflection was 15 ${\mu}m$ at 5 V. The fabrication process from SIMOX (Separation by oxygen ion implantation) wafer is presented in detail with the PZT film deposition process. The PZT films are characterized by investigating the ferroelectric properties, dielectric constant, and dielectric loss. Tip deflections of 12 ${\mu}m$ at 5 V are measured, which agreed well with the predicted value. The 18 ${\mu}l/s$ leakage rate of air was observed at a pressure difference of 1000 Pa. Micro cooler is introduced, and its possible application to micro compressor is discussed.

Keywords

References

  1. DeVoe, D. L. and Pisano, A. P., 1997, 'Modeling and Optimal Design of Piezoelectric Cantilever Microactuators,' Journal of Microelectro-mechanical Systems, Vol. 6, pp.266-270 https://doi.org/10.1109/84.623116
  2. Du, L., Kwon, G., Arai, F., Fukuda, T., Itoigawa, K. and Tukahara, Y., 2003, 'Structure Design of Micro Touch Sensor Array,' Sensors and Actuators A: Physical, Vol. 107, pp. 7-13 https://doi.org/10.1016/S0924-4247(03)00105-5
  3. Flynn, A. M., Tavrow, L. S., Bart, S. F., Brooks, R. A., Ehrlich, D. J., Udayakumar, K. R. and Cross, L. E., 1992, 'Piezoelectric Micromotors for Microrobots,' Journal of Microelectro-mechanical Systems, Vol. 1, pp. 44-51 https://doi.org/10.1109/84.128055
  4. Galassi, C., Dinescu, M., Uchino, K. and Sayer, M., 1999, Piezoelectric Materials: Advances in Science, Technology and Applications, Kluwer Academic Publishers
  5. Itoh, T., Lee, C., Sasaki, G. and Suga, T., 1996, 'Sol-gel Derived PZT Force Sensor for Scanning Force Microscopy,' Materials Chemistry and Physics, Vol, 44, pp. 25-29 https://doi.org/10.1016/0254-0584(95)01647-D
  6. Kanno, I., Kotera, H. and Wasa, K., 2003, 'Measurement of Transverse Piezoelectric Properties of PZT Thin Films,' Sensors and Actuators A: Physical, Vol. 107, pp.68-74 https://doi.org/10.1016/S0924-4247(03)00234-6
  7. Kim, C. and Koo, K., 2002, 'Development of a PZT Fiber/Piezo-polymer Composite Actuator with Interdigitated Electrodes,' KSME International Journal, Vol. 16, No.5, pp.666-675
  8. Kim, D., Kim, B. and Park, J., 2004, 'Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications,' KSME International Journal, Vol. 18, No.5, pp.789-797
  9. Koch, M., Harris, N., Evans, A. G. R., White, N. M. and Brunnschweiler, A., 1998, 'A Novel Micromachined Pump Based on Thick-Film Piezoelectric Actuation,' Sensors and Actuators A : Physical , Vol. 70, pp. 98-103 https://doi.org/10.1016/S0924-4247(98)00120-4
  10. Kueppers, H., Leuerer, T., Schnakenberg, U., Mokwa, W., Hoffmann, M., Schneller, T., Boettger, U. and Waser, R., 2002, 'PZT Thin Films for Piezoelectric Microactuator Applications,' Sensors and Actuators A: Physical, Vol. 97-98, pp.680-684 https://doi.org/10.1016/S0924-4247(01)00850-0
  11. Lee, S. S. and White, R. M., 1998, 'Piezoelectric cantilever voltage-to-frequency converter,' Sensors and Actuators A : Physical, Vol. 71, pp. 153-157 https://doi.org/10.1016/S0924-4247(98)00157-5
  12. Nam, Y. and Sasaki, M., 2002, 'Strain rate self-sensing for a cantilevered piezoelectric beam,' KSME International Journal, Vol. 16, No.3, pp.310-319
  13. Ryu, W. H., Chung, Y. -C., Choi, D. -K., Yoon, C. S., Kim, C. K. and Kim, Y. -H., 2004, 'Computer Simulation of the Resonance Characteristics and the Sensitivity of Cantilever-Shaped Al/PZT/RuO2 Biosensor,' Sensors and Actuators B : Chemical, Vol. 97, pp.98-102 https://doi.org/10.1016/j.snb.2003.07.015
  14. Yamashita, K., Katata, H., Okuyama, M., Miyoshi, H., Kato, G., Aoyagi, S. and Suzuki, Y., 2002, 'Arrayed Ultrasonic Microsensors with High Directivity for in-air Use Using PZT Thin Film on Silicon Diaphragms,' Sensors and Actuators A: Physical, Vol. 97-98, pp. 302-307 https://doi.org/10.1016/S0924-4247(02)00037-7