Laser Solutions (한국레이저가공학회지)
- Volume 8 Issue 1
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- Pages.9-18
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- 2005
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- 1229-0963(pISSN)
Fabrication of waveguide using UV Ar-ion laser direct writing
Laser Direct Writing 방법을 이용한 광도파로 제작
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Kang H. S.
(Laser Application Group, Korea Institute of Machinery & Materials) ;
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Suh J.
(Laser Application Group, Korea Institute of Machinery & Materials) ;
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Lee J. H.
(Laser Application Group, Korea Institute of Machinery & Materials) ;
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Kim J. O.
(Laser Application Group, Korea Institute of Machinery & Materials)
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강희신
(한국기계연구원 레이저응용시스템그룹) ;
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서정
(한국기계연구원 레이저응용시스템그룹) ;
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이제훈
(한국기계연구원 레이저응용시스템그룹) ;
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김정오
(한국기계연구원 레이저응용시스템그룹)
- Published : 2005.04.01
Abstract
The laser direct writing method using a UV Argon-ion laser is studied for fabrication of waveguide. The laser direct writing system is constructed with a vision camera, a xy-stage, a motion controller and the delivery components of a laser beam. The UV Argon-ion laser has wavelength range of