References
- Jang, S. M., 'Technology and application of Linear motor,' pp. 3-24, 1999
- Lee, G. W., Cho, Y. J., Song, C. S., 'Development of a Brushless Linear DC Motor for High Speed and Precise Position Control,' KSPE, Vol. 15, No 10, pp. 73-80, 1998
- Eun, I. U., 'Positioning Technology by Linear Motor,' KSPE, Vol. 17, No. 12, pp. 20-25, 2000
- Lee, C. H., 'Ultraprecision Positioning Technology,' KSPE, Vol. 17, No. 12, pp. 9-15, 1990
- Jack, J., Tim, H. and Jim, M., 'Linear Motor Basics,' Parker Hannifin Corporation, pp. 1-8
- Rim, K. H., Lee, E. K., Cho, J. K., 'Vibration Analysis of Spin Etcher,' KSSET, Vol. 2, No. 1, pp. 15-19. 2003
- An, C. H., Rim, K. H., 'Dynamic Analysis of a Slider in Near-field Optical Recording Disk Drive,' KSNVE, Vol. 13, No. 3, pp. 164-171, 2003 https://doi.org/10.5050/KSNVN.2003.13.3.164