JSTS:Journal of Semiconductor Technology and Science

  • 제4권4호
  • /
  • Pages.300-306
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  • 2004
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  • 1598-1657(pISSN)
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  • 2233-4866(eISSN)
대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

A Micromachined Two-state Bandpass Filter using Series Inductors and MEMS Switches for WLAN Applications

  • Kim, Jong-Man (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Lee, Sang-Hyo (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Park, Jae-Hyoung (LG Electronics Institute of Technology) ;
  • Kim, Jung-Mu (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Baek, Chang-Wook (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kwon, Young-Woo (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 발행 : 2004.12.31
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초록

This paper reports a novel tunable bandpass filter using two-state switched inductor with direct-contact MEMS switches for wireless LAN applications. In our filter configuration, the switched inductor is implemented to obtain more stable and much larger frequency tuning ratio compared with variable capacitor-based tunable filter. The proposed tunable filter was fabricated using a micromachining technology and electrical performances of the fabricated filter were measured. The filter consists of spiral inductors, MIM capacitors and direct-contact type MEMS switches, and its frequency tunability is achieved by changing the inductance that is induced by ON/OFF actuations of the MEMS switches. The actuation voltage of the MEMS switches was measured of 58 V, and they showed the insertion loss of 0.1 dB and isolation of 26.3 dB at 2 GHz, respectively. The measured center frequencies of the fabricated filter were 2.55 GHz and 5.1 GHz, respectively. The passband insertion loss and 3-dB bandwidth were 4.2 dB and 22.5 % at 2.55 GHz, and 5.2 dB and 23.5 % at 5.1 GHz, respectively.

키워드

참고문헌

  1. Y. Liu, A. Borgioli, A.S. Nagra, and R.A. York, 'DistrihutedMEMS Transmission Lines for Tunable Filter Applications,' Int. J. RF Microwave CAE, vol. 11. pp, 254-260, 2001
  2. Charles L. Goldsmith, Andrew Malczewski, Zhimin Jamie Yao, Shea Chen, and David Hinzel, 'RF MEMS variable capacitors for tunable filters,' Int. J. RF Microwave CAE, Vol, 9, pp. 362-374, 1999 https://doi.org/10.1002/(SICI)1099-047X(199907)9:4<362::AID-MMCE7>3.0.CO;2-H
  3. Z.J. Yao, S. Chen, S. Eshelman, D. Denniston and C. Goldsmith, 'Micromachined low-loss microwave switches,' IEEE J. Microeiectromech. Syst., Vol, 8, no. 2, pp, 129-134, 1999 https://doi.org/10.1109/84.767108
  4. D. Peroulis, S. Pacheco, K. Sarabandi, and L.P.B. Kawhi, 'Tunable lurnped components with applications In reconfigurable MEMS filters' in IEEE MTT-S Int. Microwave Symp. Dig., Phoenix, AZ, May 2001, pp, 341-344
  5. A. Abbaspour-Tamijani, L. Dussopt, and G.M. Rebeiz, 'A High Performance MEMS Miniature Tunable Bandpass Filter,' in IEEE MTT-S Int. Microwave Symp. Dig., vol. 3, Philadelphia, Pennsylvania, June 2003, pp. 1785-1788
  6. B. Lakshminarayanan, and T. Weller, 'Tunable Bandpass Filter Using Distributed MEMS Transmission Lines,' IEEE MTT-S Int. Microwave Symp. Dig., vol, 3, Philadelphia, Pennsylvania, June 2003, pp, 1789-1792, 2003
  7. A. Abbaspour-Tsmijarri, L. Dussopt, G. M. Rebeiz, 'A milllirncterwave tunable filter using MEMS varaetors,' in European Microwave Conf. Dig., Milan, Italy, Sept 2002, pp, 813-815
  8. P. Blondy, C. Champeaux, P. Tristant, D. Cros, C. Cstherinot, P. Guillon, E. Forum, G. Tanne, E. Rius, F. Huret, 'Tunable interdigital filters using MEMS capacitors,' in European Microwave Conf. Dig., Milan, Italy, Sept. 2002, pr. 801-804
  9. H.-T. Kim, J.-H. Park, Y.-K. Kim, and Y. Kwon, 'Low-Loss and Compact V -Band MEMS-Based Analog Tunable Bandpass Filters,' IEEE Microwave and wireless comp. Lett., Vol, 12, pp. 432-434, 2001 https://doi.org/10.1109/LMWC.2002.805543
  10. I. Zine-El-Abidine, M. Okoniewski, and J.G. McRory, 'A New Class of Tunable RF MEMS Inductors,' Proc. Int. Conf. on MEMS, NANO and Systems, ?, ?, 2003, pp. 114-115 https://doi.org/10.1109/ICMENS.2003.1221976
  11. J.-.H. Park, H.-T. Kim,W. Choi, Y. Kwon, and Y.-K. Kim, 'V-band reflection type phase shifter using micromachined CPW coupler and RF switches,' IEEE J. Microelech. Syst., Vol. 11, no. 2, pp. 808-814, 2002 https://doi.org/10.1109/JMEMS.2002.805042