Journal of Korean Ophthalmic Optics Society (한국안광학회지)
- Volume 9 Issue 2
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- Pages.291-299
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- 2004
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- 1226-5012(pISSN)
Optical properties of diamond-like carbon films deposited by ECR-PECVD method
ECR-PECVD 방법으로 증착한 Diamond-Like carbon 박막의 광 특성
- Kim, Dae-Nyoun (Dept. of Eyewear Design Engineering, Daegu Health College) ;
- Kim, Ki-Hong (Dept. of Ophthalmic Optics, Kyungwoon university) ;
- Kim, Hye-Dong (Dept. of Ophthalmic Optics, Daegu Health College)
- Received : 2004.05.14
- Published : 2004.12.31
Abstract
DLC films were deposited using the ECR-PECVD method with the fixed deposition condition, such as ECR power, methane and hydrogen gas-flow rates and deposition time, for various substrate bias voltage. We have investigated the ion bombardment effect induced by the substrate bias voltage on films during the deposition of film. The characteristic of the films were analyzed using the FTIR, Raman, and UV/Vis spectroscopy analysis shows that the amount of dehydrogenation in films was increased with the increase of substrate bias voltage and films thickness was decreased. Raman scattering analysis shows that integrated intensity ratio(ID/IG) of the D and G peak was increased as the substrate bias voltage increased and films hardness was increased. Optical transmittances of DLC film were decreased with increasing deposition time and substrate bias voltage. From these results, it can be concluded that films deposited at this experimental have the enhanced characteristics of DLC because of the ion bombardment effect on films during the deposition of film.
ECR-PECVD 방법을 이용하여 ECR power,
Keywords
- Diamond-like carbon(DLC);
- Electron cyclotron resonance-plasma enhanced chemical vapor deposition(ECR-PECVD)