Journal of the Optical Society of Korea

  • 제8권3호
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  • Pages.127-131
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  • 2004
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  • 1226-4776(pISSN)
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  • 2093-6885(eISSN)
한국광학회 (Optical Society of Korea)
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Femtosecond Micromachining Applications for Optical Devices

  • Sohn, Ik-Bu (Optical Network and Systems Laboratory, Information and Communication University) ;
  • Lee, Man-Seop (Optical Network and Systems Laboratory, Information and Communication University) ;
  • Woo, Jeong-Sik (Phoco Co. Ltd.)
  • 투고 : 2004.04.28
  • 발행 : 2004.09.01
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초록

This paper investigates applications of femtosecond lasers for the micromachining of transparent materials and fabrication of optical devices. We show commercial micromachining examples of transparent materials which have been fabricated for various applications. Near infrared femtosecond laser processing is an attractive method to fabricate three-dimensional optical waveguides into various transparent materials. Focused femtosecond laser pulses induce a permanent refractive-index change only near the focal point. We also demonstrate a Y coupler with the splitting ratio of 1:1 written by femtosecond laser pulses into a fused silica glass. The minimum propagation loss of 0.8 ㏈/㎝ awl the refractive-index change of 0.006-0.01 at the wavelength of 1550 ㎚ were achieved by optimization of the laser fluence.

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참고문헌

  1. S. Juodkazis, S. Matsuo, H. Misawa, V. Mizeikis, A. Marcinkevicius, H. B. Sun, Y. Tokuda, M. Takahashi, T. Yoko, and J. Nishii, "Application of femtosecond laser pulses for microfabrication of transparent media," Applied Surface Science, vol. 197-198, pp. 705-709, 2002 https://doi.org/10.1016/S0169-4332(02)00397-5
  2. T. Juhasz, F. H. Loesel, R. M. Kurtz, C. Horvath, J. F. Bille, and G. Moruou, 'Corneal refractive surgery with femtosecond lasers,' IEEE J. Quantum Electron., vol. 5, no. 4, pp. 902-910, 1999 https://doi.org/10.1109/2944.796309
  3. K. H. Leong, A. A. Said, and R. L. Maynard, "Femtosecond micromachining applications for electro-optic components," in Electronic Components and Technology Conference, IEEE, vol. 29, pp. 210-214, 200l https://doi.org/10.1109/ECTC.2001.927720
  4. W. Rudolph, P. Dorn, X. Liu, N. Vretenar, and R. Stock, 'Microscopy with femtosecond laser pulses: applications in engineering, physics and biomedicine,' Applied Surface Science, vol. 9614, pp. 1-6, 2003 https://doi.org/10.1016/S0169-4332(02)01388-0
  5. A. Salleo, T. Sands, and F. Y. Genin, 'Machining of transparent materials using an IR and UV nanosecond pulsed laser,' Appl. Phys. A, vol. 71, pp. 601-608, 2000 https://doi.org/10.1007/s003390000546
  6. J. Zhang, K. Sugioka, and K. Midorikawa, 'High-quality and high-efficiency machining of glass materials by laser-induced plasma-assisted ablation using conventional nanosecond UV, visible, and infrared lasers,' Appl. Phys. A, vol. 69, pp. 879-882, 1999 https://doi.org/10.1007/s003390051551
  7. R. Teghil, L. D'Alessio, A. Santagata, M. Zaccagnino, D. Ferro, and D. J. Sordelet, 'Picosecond and femtosecond pulsed laser ablation and deposition of quasicrystals,' Applied Surface Science, vol. 210, pp. 307-317, 2003 https://doi.org/10.1016/S0169-4332(03)00082-5
  8. M. R. Kasaai, V. Kacham, F. Theberge, and S. L. Chin, 'The interaction of femtosecond and nanosecond laser pulses with the surface of glass,' J. Non-Crystalline Solids, vol. 319, pp. 129-135, 2003 https://doi.org/10.1016/S0022-3093(02)01909-9
  9. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, 'Photowritten optical waveguides in various glasses with ultrashort pulse laser,' Appl. Phys. Lett., vol. 71, no. 23, pp. 3329-3331, 1997 https://doi.org/10.1063/1.120327
  10. K. Hirao and K. Miura, 'Writing waveguides and gratings in silica and related materials by a femtosecond laser,' J. Non-Cryst. Solids, vol. 239, pp. 91-95, 1998 https://doi.org/10.1016/S0022-3093(98)00755-8
  11. Y. Kondo, K. Nouchi, T. Mitsuyu, M. Watanabe, P. Kazansky, and K. Hirao, 'Fabrication of long-period fiber gratings by focused irradiation of infrared femtosecond laser pulses,' Optics Lett., vol. 24, no. 10, pp. 646-1648, 1999 https://doi.org/10.1364/OL.24.000646
  12. Y. Sikorski, A. A. Said, P. Bado, R. Maynard, C. Flrea, and D. K. Killinger, 'Optical waveguide amplifier in Nd-doped glass written with near-IR femtosecond laser pulses,' Electron. Lett., vol. 36, pp. 396-398, 2000 https://doi.org/10.1049/el:20000172
  13. D. Homoelle, S. Wielandy, and A. Gaeta, 'Infrared photosensitivity in silica glasses exposed to femtosecond laser pulses,' Opt. Lett., vol. 24, no. 18, pp. 1311-1313, 1999 https://doi.org/10.1364/OL.24.001311

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