Adhesion Properties of UV-curable Pressure Sensitive Adhesives for Dicing Tape

다이싱 테이프용 자외선 경화형 점착제의 접착 물성

UV-curable pressure sensitive adhesives were prepared by blending acrylic copolymer, copolymerized with butyl acrylate, acrylic acid and methyl methacrylate by solution polymerization, and trimethylolpropane triacrylate. The PSAs were evaluated by adhesion strength with varying UV dose, and also glass transition temperature ($T_g$) of PSAs were measured. When exposed on UV irradiation, the PSAs showed the decreased adhesion strength and increased $T_g$. And following UV irradiation, the PSAs did not leave any residue on wafer after peel off PSA.

다이싱 테이프에 사용되는 UV경화형 점착제를 아크릴 공중합체를 butyl acrylate, acrylic acid, methyl methacrylate를 용액 중합을 통해 중합한 뒤, trimethylolpropane triacrylate를 블렌딩하여 제조하였다. 제조된 점착제는 UV 조사량에 따라 접착력, 유리전이온도 ($T_g$)를 측정하였는데 UV 조사량이 증가할수록 접착력은 급격하게 감소하였고 $T_g$도 증가하였다. 웨이퍼 표면에 점착 샘플을 부착하여 UV 조사 후 박리하여 표면을 관찰한 결과 점착잔류물을 남기지 않았다.