Journal of Advanced Marine Engineering and Technology

The Korean Society of Marine Engineering (한국마린엔지니어링학회)
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Optimal Central Control of OHT(Overhead Hoist Transport) in Semiconductor Processing

반도체 공정에 이용되는 지능형 천장 반송 시스템의 최적 중앙제어

  • 오진석 (한국해양대학교 선박전자기계공학부) ;
  • 김학선 (한국해양대학교 선박전자기계공학부)
  • Published : 2004.11.01
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Abstract

There is an Overhead Hoist Transport(OHT) for delivering the wafer in semiconductor processing. The transfer system is consists of carrier vehicle. rail, and support. OHTCMS(OHT Control and Management System) has to take the feature, such as the optimal control and integration with several OHT. In this paper, ESRA(Efficiency of Shortest - Route Algorithms) is proposed which can be transported optimal route and be prevented collision using the Floyd-Warshall algorithms. The proposed algorithm is verified through consecutive simulation for a long time.

Keywords

References

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