Journal of Institute of Control, Robotics and Systems (제어로봇시스템학회논문지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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Feedback Control for Expanding Range and Improving Lineraity of Microaccelerometers

가속도계의 동작범위 확장와 선형성 향상을 위한 피드백 제어

  • 박용화 (서울대학교 전기컴퓨터공학부) ;
  • 박상준 (서울대학교 전기컴퓨터공학부) ;
  • 최병두 (서울대학교 전기컴퓨터공학부) ;
  • 고형호 (서울대학교 전기컴퓨터공학부) ;
  • 송태용 (서울대학교 전기컴퓨터공학부) ;
  • 임근원 (서울대학교 전기컴퓨터공학부) ;
  • 허건수 (한양대학교 기계공학부) ;
  • 박장현 (한양대학교 기계공학부) ;
  • 조동일 (서울대학교 전기컴퓨터공학부)
  • Published : 2004.11.01
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Abstract

This paer presents a feedback-controlled, MEMS-fabricated microaccelerometer($\mu$XL). The $\mu$XL has received much commercial attraction, but its performance is generally limited. To improve the open-loop performance, a feedback controller is designed and experimentally evaluated. The feedback controller is applied to the x/y-axis $\mu$XL fabricated by sacrificial bulk micromachining(SBM) process. Even though the resolution of the closed-loop system is slightly worse than open-loop system, the bandwidth, linearity, and bias stability are stability are significantly improved. The noise equivalent resolution of open-loop system is 0.615 mg and that of closed-loop system is 0.864 mg. The bandwidths of open-loop and closed-loop system are over 100Hz. The input range, non-linearity and bias stability are improved from $\pm10\;g\;to\;\pm18g$, from 11.1%FSO to 0.86%FSO, and from 0.221 mg to 0.128 mg by feedback control, respectively.

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References

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