Journal of Mechanical Science and Technology

The Korean Society of Mechanical Engineers (대한기계학회)
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Experimental Study on Spray Etching Process In Micro Fabrication of Lead Frame

  • Jung, Ji-Won (Research Institute of Mechanical Technology, Pusan National University) ;
  • Choi, Gyung-Min (School of Mechanical Engineering, Pusan National University) ;
  • Kim, Duck-Jool (School of Mechanical Engineering, Pusan National University)
  • Published : 2004.12.01
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Abstract

The objective of this study is to obtain detailed information for the micro fabrication of lead frames by applying spray technology to wet etching process. Wet etching experiments were performed with different etching parameters such as injection pressure, distance from nozzle tip to etched substrate, nozzle pitch and etchant temperature. The characteristics of single and twin spray were measured to investigate the correlation between the spray characteristics and the etching characteristics. Drop size and velocity were measured by Phase-Doppler Anemometer (PDA). Four liquids of different viscosity were used to reveal the effects of viscosity on the spray characteristics. The results indicated that the shorter the distance from nozzle tip and the nozzle pitch, the larger etching factor became. The average etching factor had good positive correlation with average axial velocity and impact force. It was found that the etching characteristics depended strongly on the spray characteristics.

Keywords

References

  1. Abate, K., 2000, 'Photochemical Etching of Metals,' Metal Finishing, Vol. 98, No. 6, pp. 414-417 https://doi.org/10.1016/S0026-0576(00)80439-0
  2. Allen, D. M., 1986, 'The Principles and practice of Photochemical Machining and Photoetching,' Adam Hilger, Bristol and Boston
  3. Chang, C. T. and Farrell, P. V., 1997, 'A Study on the Effects of Fuel Viscosity and Nozzle Geometry on High Injection Pressure Diesel Spray Characteriatics,' SAE Paper 970353, pp. 235-244
  4. Choi, Y. C., Jung, J. W. and Kim, D. J., 2001, 'Characteristics of Spray from Pressure-Swirl Nozzle with Different Liquid Properties and Nozzle Geometries,' Trans. of KSME (B), Vol. 25, No. 12, pp. 1813-1820
  5. Geissler, M., Schmid, H., Michel, B. and Delamarche, E., 2003, 'Selective Wet Etching of Microcontact printed Cu Substrates with Control over the Etch Profile,' Microelectronic Engineering, Vol. 67, pp. 326-332 https://doi.org/10.1016/S0167-9317(03)00086-8
  6. Jung, J. W. and Kim, D. J., 2004, 'A Study on Effect of Spray Characteristics on Etching Characteristics in Micro Fabrication System,' Trans. of KSME (B), Vol. 28, No. 1, pp. 109-117 https://doi.org/10.3795/KSME-B.2004.28.1.109
  7. Jung, J. W., Kim, Y. J. and Kim, D. J., 2004, 'Correlation Between Spray Characteristics and Etching Characteristics in Twin Spray,' Trans. of KSME (B), Vol. 28, No. 4, pp. 449-455 https://doi.org/10.3795/KSME-B.2004.28.4.449
  8. Sdiahmed, M. M., Brown, R. B. and Darvishvand, M., 1999, 'Drop-Size/Velocity Correlations at Formation of Sprays from Fan Nozzles,' Transactions of the ASAE, Vol. 42(6), pp. 1557-1564 https://doi.org/10.13031/2013.13320
  9. Sundaram, K. B., Sah, R. E., Baumann, H., Balachandran, K. and Todi, R. M., 2003, 'Wet etching Studies of Silicon Nitride Thin Films Deposited by Electron Cyclotron Resonance Plasma Enhanced Chemical Vapor Deposition,' Microelectronic Engineering, Vol. 70, pp. 109-114 https://doi.org/10.1016/S0167-9317(03)00412-X
  10. Ueda, R., Toki, S., Tanizaki, Y., Sugiutra T. and Asakura, S., 1994, 'Principles of Photoetching in the Fabrication of Fine-Pitch Lead Frames,' Metal finishing, Vol. 92, No. 1, pp. 29-31
  11. Visser, A. and Buhlert, M., 2001, 'Theoretical and Practical Aspects of the Miniaturization of Lead Frames by Double Sided Asymmetrical Spray Etching,' Journal of Materials Processing Technology, Vol. 115, pp. 108-113 https://doi.org/10.1016/S0924-0136(01)00751-8