DOI QR코드

DOI QR Code

Fabrication of Coated Conductor by Continuous PVD Methods

연속 공정 PVD 방법에 의한 Coated Conductor 제조

  • 고락길 (한국전기연구원 초전도재료연구그룹) ;
  • 정준기 (한국전기연구원 초전도재료연구그룹) ;
  • 김호섭 (한국전기연구원 초전도재료연구그룹) ;
  • 하홍수 (한국전기연구원 초전도재료연구그룹) ;
  • ;
  • 송규정 (한국전기연구원 초전도재료연구그룹) ;
  • 박찬 (한국전기연구원 초전도재료연구그룹) ;
  • 유상임 (서울대학교 재료공학과) ;
  • 문승현 (서울대학교 재료공학과) ;
  • 김영철 (부산대학교 물리학과)
  • Published : 2004.11.01

Abstract

Continuous physical vapor deposition (PVD) method is one of many processes to fabricate long length coated conductor which is required for successful large-scale application of superconducting power devices. Three film deposition systems (pulsed laser deposition, sputtering, and evaporation) equipped with reel-to-reel(R2R) metal tape moving apparatus were installed and used to deposit multi-layer oxide thin films. Both RABiTS and IBAD texture templates are used. IBAD template consists of CeO$_2$(PLD)/YSZ(IBAD) on stainless steel(SS) metal tape, and RABiTS template has the structure of CeO$_2$/YSZ/Y$_2$O$_3$ which was continuously deposited on Ni-alloy tape using R$_2$R evaporation and DC reactive sputtering in a deposition system designed to do both processes. 0.4 m-long coated conductor with Ic(77 K) of 34 A/cm was fabricated using RABiTS template. 0.5 m and 1.1 m-long coated conductor with Ic(77 K) of 41 A/cm and 26 A/cm were fabricated using IBAD template.

Keywords

References

  1. Y. Iijima, K. Kakimoto, M. Kimura, K. Takeda, and T. Saitoh, 'Reel to reel continuous formation of Y-123 coated conductors by IBAD and PLD method', IEEE Trans. Appl. Superconductivity, Vol. 11, No. 1, p. 2816, 2001 https://doi.org/10.1109/77.919649
  2. A. Usoskin, H. C. Freyhardt, A. Issaev, J. Dzick, J. Knoke, M. P. Oomen, M. Leghissa, and H. W. Neumueller, 'Large-area YBCOcoated stainless steel tapes with high critical currents', IEEE Trans. Appl. Superconductivity, Vol. 13, No.2, p. 2452, 2003 https://doi.org/10.1109/TASC.2003.811819
  3. V. Selvamanickam, H. G. Lee, Y. Li, J. Reeves, Y. Qias, Y. Y. Xie, K. Lenseth, G. Carota, M. Funk, K. Zdum, J. Xie, K. Likes, M. Jones, L. Jope, and D. W. Hazelton, 'Scale up of high-performance Y-Ba-Cu-O coated conductors', IEEE Trans. Appl. Super., Vol. 13, No.2, p. 2492, 2003 https://doi.org/10.1109/TASC.2003.811829
  4. A. Goyal, D. P. Norton, J. D. Budai, M. Paranthaman, E. D. Specht, D. M. Kroeger, D. K. Christen, Q. He, B. Saffian, F. A. List, D. F. Lee, P. M. Martin, C. E. Klabunde, E. Hartfield, and V. K. Sikka, 'High critical current density superconducting tapes by epitaxial deposition of YBa2Cu3Ox thick films on biaxially textured metals', Appl. Phys. Lett., Vol. 69, p. 1795, 1996 https://doi.org/10.1063/1.117489
  5. Y. Iijima, N. Tanabe, Y. Ikeno, and O. Kohno, 'Biaxially aligned YBCO thin film tapes', Physica C, Vol. 185, p. 1959, 1991 https://doi.org/10.1016/0921-4534(91)91104-C
  6. K. Fujino, N. Yoshida, S. Okuda, T. Hara, T, Ohkuma, and H. Ishii, 'One meter long thin film tape with Jc more than 105 A/$cm^2$ fabricated by pulsed laser deposition', Advances in superconductivity VII, Tokyo: Springer, p. 629, 1995