한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제21권9호
  • /
  • Pages.41-47
  • /
  • 2004
  • /
  • 1225-9071(pISSN)
  • /
  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

마이크로 방전 밀링을 이용한 미세 구조물 제작

Fabrication of 3D Micro Structure Using Micro Electrical Discharge Milling

  • 이병욱 (서울대학교 대학원 기계항공공학부) ;
  • 이상민 (서울대학교 대학원 기계항공공학) ;
  • 김보현 (서울대학교 대학원 기계항공공학) ;
  • 주종남 (서울대학교 기계항공공학부)
  • 발행 : 2004.09.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

As mechanical structures are minimized, the demand on micro dies and molds has increased. Machining complex 3D shapes requires fabrication procedures for preparing the electrodes. Micro electrical discharge milling using a simple shape electrode can produce 3D micro structure. In this paper the machining characteristics of micro electrical discharge milling according to depth of cut and capacitance are investigated. The machining time is diminished when simple tool-paths and algorithms for changing the feedrate are applied. But a distorted bottom shape and a tapered wall shape are inevitable after machining. The distorted bottom shape and the taper angle of wall are reduced by finish machining.

키워드

참고문헌

  1. Masaki, T., Kawata, K. and Masuzawa, T., 'Micro Electro-Discharge Machining and Its Applications,' Proc. IEEE Micro Electro Mechanical System Workshop, pp. 21-26, 1990 https://doi.org/10.1109/MEMSYS.1990.110240
  2. Masuzawa, T., Tsukamoto, J. and Fujino, M., 'Drilling of Deep Microholes by EDM,' Annals of the CIRP, Vol. 38, No. 1, pp. 195-198, 1989 https://doi.org/10.1016/S0007-8506(07)62683-3
  3. Kim, G. M., Kim, B. H. and Chu, C. N., 'Machining Rate and Electrode Wear Characteristics in Micro-EDM of Micro-Holes,' Journal of the KSPE, Vol. 16, No. 10, pp. 94-100, 1999
  4. Yu, Z. and Rajurkar, K. P., 'Generation of Complex Micro Cavities by Micro EDM,' Transactions of NAMRI/SME, Vol. 28, pp. 233-237, 2000
  5. 마이크로 가공기술 편집위원회, '마이크로 가공기술,' 기전연구사, pp. 22-25, 1995
  6. Masuzawa, T., Fujino, M. and Kobayashi, K., 'Wire Electrodischarge Grinding for Micro-Machining,' Annals of the CIRP, Vol. 34, pp. 431-424, 1985 https://doi.org/10.1016/S0007-8506(07)61805-8
  7. Tsai, Y. Y., Masuzawa, T. and Fujino, M., 'Investigation on Electrode Wear in Micro-EDM,' Proceedings of the International Symposium for Electromachining, ISEM XIII, Spain, pp. 719-726, 2001
  8. Cho, P. J., Lee, S. M., Choi, D. G. and Chu, C. N., 'Characteristics of RC circuit with Transistor in Micro-EDM,' Proceedings of the KSPE, pp. 235-240, October 2002