The Transactions of the Korean Institute of Electrical Engineers C (대한전기학회논문지:전기물성ㆍ응용부문C)

The Korean Institute of Electrical Engineers (대한전기학회)
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Comparison of Models and Numerical Analysis Methods in Fluid Simulation of High Density Inductively Coupled Plasma Sources

고밀도 유도결합 플라즈마원 유체 수송 시뮬레이션을 위한 모델 및 수치해석 방법 비교

  • Published : 2004.08.01
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Abstract

Various models and various boundary conditions have been suggested for fluid transport simulations of high density plasma discharges such as the inductively coupled plasma discharge. In this work, we compare the various models using one-dimensional simulations based on the FDM(finite difference method), the upwind scheme, the power-law scheme, and the dielectric relaxation scheme［l］ Comparing the exactness, the numerical stability and the efficiency of the various models. the most adoptable model is suggested.

Keywords

References

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