Transactions on Electrical and Electronic Materials

  • 제5권3호
  • /
  • Pages.120-121
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  • 2004
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  • 1229-7607(pISSN)
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  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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Fabrication of High Tc Superconducting Films by CVD Process

  • Lee, Sang-Heon (Department of Electronics Information and Communication Engineering, Sun Moon University)
  • 발행 : 2004.06.01
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초록

YBaCuO thick films were fabricated by plasma enhanced chemical vapor deposition, and the crystallinity and the superconducting properties were investigated. The growth temperature to obtain the thick films was decreased by around 150$^{\circ}C$ due to plasma enhancement. The zero resistivity temperatures for films grown at 590$^{\circ}C$ and 620$^{\circ}C$ were 55 and 80 K, respectively.

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참고문헌

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