Journal of Navigation and Port Research (한국항해항만학회지)

Korean Institute of Navigation and Port Research (한국항해항만학회)
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Design of a Reconfigurable Slot Antenna using Sequentially Voltage-Applied RF MEMS Switches

순차적으로 전압 인가된 RF MEMS스위치를 이용한 재구성 슬롯 안테나의 설계

  • 심준환 (한국해양대학교 전파정보통신공학부) ;
  • 윤동식 (한국해양대학교 전파정보통신공학) ;
  • 박동국 (한국해양대학교 전파정보통신공학) ;
  • 강인호 (한국해양대학교 전파정보통신공학) ;
  • Published : 2004.06.01
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Abstract

In this paper, we designed a reconfigurable slot antenna using sequentially voltage-applied RF MEMS switches. In order to obtain pull-in voltage and maximum stress of the MEMS switches, the switch structures in accordance with airgap height was analyzed by ANSYS simulation A actuation voltage of MEMS switches can be determined by switch geometry and airgap height between a movable plate and a bottom plate. The designed lengths of MEMS switches were 240 $\mu\textrm{m}$, 320 $\mu\textrm{m}$, 400 $\mu\textrm{m}$, respectively and the airgap was 6$\mu\textrm{m}$. The total size of the designed slot antenna was 10 mm x 10 mm and the slot length and width were 500 $\mu\textrm{m}$ and 200 $\mu\textrm{m}$, respectively. The length and size of the CPW feedline were 5 mm and 30-80-30 $\mu\textrm{m}$, respectively. and then the size of the CPW in the slot was 50-300-150 $\mu\textrm{m}$. The tuning of the resonant frequency of the proposed device is realized by varying the electrical length of the antenna, which is controlled by applying the DC bias voltages to the RF MEMS switches. The designed slot antenna has been simulated, fabricated and measured.

본 논문은 순차적으로 전압 인가된 RF MEMS 스위치를 이용하여 재구성 슬롯 안테나를 설계하였다. MEMS 스위치의 구동전압은 하부 전극과 상부 스위치 사이의 에어캡 높이에 따른 스위치의 특성을 ANSYS 시뮬레이션으로 분석하였다. MEMS 스위치의 구동전압은 하부전극과 상부 스위치 사이의 에어캡 높이와 스위치 형상에 의해 결정된다. 설계된 MEMS 스위치의 길이는 각각 240$\mu\textrm{m}$, 320 $\mu\textrm{m}$, 400 $\mu\textrm{m}$ 이고, 에어캡은 6$\mu\textrm{m}$이었다. 설계된 슬롯 안테나는 전체크기가 10 mm x 10 mm이며, 슬롯의 크기는 길이가 500 $\mu\textrm{m}$, 폭이 200 $\mu\textrm{m}$이었다. 그리고 CPW 급전선은 전체의 길이는 5 mm이며, 입구에서의 CPW는 30-80-30 $\mu\textrm{m}$이괴, 슬롯에서의 CPW는 150-300-150 $\mu\textrm{m}$이다. 세안된 소사의 공진주파수의 튜닝은 RF MEMS 스위치에 DC 바이어스를 인가함으로서 안테나의 전기적인 길이를 변화시켜 이루어진다. 설계된 슬롯 안테나를 시뮬레이션, 제조 및 측정을 하였다.

Keywords

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