Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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A Study on Improvement of Etching Characteristics by Spray Characteristics Analysis with Nozzle Geometries in Wet Etching Process

습식 에칭공정에서 노즐 형상에 따른 분무특성 분석을 통한 에칭특성의 향상에 관한 연구

  • 정지원 (부산대학교 기계기술연구소) ;
  • 김덕줄 (부산대학교 기계공학부)
  • Published : 2004.07.01
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Abstract

The objective of this work is to study the improvement of etching characteristics in wet etching process. The etching characteristics such as etching factor were investigated under different etching conditions and compared with the spray characteristics. The spray characteristics of nozzle with different geometries such as swirler angle and swirl chamber aspect ratio were analyzed by using PDA system to predict the effect of the spray characteristics on the etching factor. The swirler angles were 49,5$^{\circ}$, 63$^{\circ}$ and 76.5$^{\circ}$. The swirl chamber aspect ratios were 1.2, 1.6 and 2.0. It was found that the etching factor was correlated with the spray characteristics and also the smaller swiller angle, the larger etching factor became.

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References

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