Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Development of Contour Offset Algorithm(COA) in nRP Process for Fabricating Nano-precision Features

복셀 차감법에 의한 나노 복화공정 정밀화

  • 임태우 (한국과학기술원 기계공학과 대학원) ;
  • 박상후 (한국과학기술원 기계공학과 대학) ;
  • 양동열 (한국과학기술원 기계공학) ;
  • 이신욱 (한국과학기술원 물리학과 대학) ;
  • 공홍진 (한국과학기술원 물리학과)
  • Published : 2004.06.01
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Abstract

In this study, a new algorithm, named as Contour Offset Algorithm(COA) is developed to fabricate precise features or patterns in the range of several micrometers by nano replication printing(nRP) process. In the nRP process, a femto-second laser is scanned on a photosensitive monomer resin in order to induce polymerization of the liquid monomer according to a voxel matrix which is transformed from the bitmap format file. After polymerization, a droplet of ethanol is dropped to remove the unnecessary remaining liquid resin and then only the polymerized figures with nano-scaled precision are remaining on the glass plate. To obtain more precise replicated features, the contour lines in voxel matrix should be modified considering a voxel size. In this study, the efficiency of the proposed method is shown through two examples in view of accuracy.

Keywords

References

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