Development of Contour Offset Algorithm(COA) in nRP Process for Fabricating Nano-precision Features

복셀 차감법에 의한 나노 복화공정 정밀화

  • 임태우 (한국과학기술원 기계공학과 대학원) ;
  • 박상후 (한국과학기술원 기계공학과 대학) ;
  • 양동열 (한국과학기술원 기계공학) ;
  • 이신욱 (한국과학기술원 물리학과 대학) ;
  • 공홍진 (한국과학기술원 물리학과)
  • Published : 2004.06.01

Abstract

In this study, a new algorithm, named as Contour Offset Algorithm(COA) is developed to fabricate precise features or patterns in the range of several micrometers by nano replication printing(nRP) process. In the nRP process, a femto-second laser is scanned on a photosensitive monomer resin in order to induce polymerization of the liquid monomer according to a voxel matrix which is transformed from the bitmap format file. After polymerization, a droplet of ethanol is dropped to remove the unnecessary remaining liquid resin and then only the polymerized figures with nano-scaled precision are remaining on the glass plate. To obtain more precise replicated features, the contour lines in voxel matrix should be modified considering a voxel size. In this study, the efficiency of the proposed method is shown through two examples in view of accuracy.

Keywords

References

  1. Maruo, S., Kawata, S., 'Two-photon-absorbed nearinfrared photopolymerization for three-dimensional microfabrication,' J. of Microelectromechanical Systems, Vol.7, No.4, pp.411-415, 1998 https://doi.org/10.1109/84.735349
  2. Kawata, S., Sun, H.B., Tanaka, T., Takada, K., 'Finer features for functional microdevices,' Nature, Vol.412, No.16, pp.697-698, 2001 https://doi.org/10.1038/35089130
  3. Sun, H.B., Takada, K., Kawata, S., 'Elastic force analysis of functional polymer submicron oscillators,' Appl. Phys. Letters, Vol.79, No.19, 2001 https://doi.org/10.1063/1.1418024
  4. Sun, H.B., Tanaka, T., Kawata, S., 'Three-dimensional focal spots related to two-photon excitation,' App. Physics letters, Vol.80, No.20, pp.3673-3675, 2002 https://doi.org/10.1063/1.1478128
  5. Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B.N., 'Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,' Optics letters, Vol.28, No.5, pp.301-303, 2003 https://doi.org/10.1364/OL.28.000301
  6. Kaneko, K., Sun, H.B., Duan, X .M., Kawata, S., 'Submicron diamond-lattice photonic crystals produced by two-photon laser nanofabrication,' Appl. Phys. Letters, Vol.83, No.11, 2003 https://doi.org/10.1063/1.1610253
  7. Sun, S.B., Maeda, M., Takada, K., Chon, J.W.M., Gu, M., Kawata, S., 'Experimental investigation of single voxels for laser nanofabrication via two-photon photopolymerization,' Vol.83, No.5, pp.819-821, 2003 https://doi.org/10.1063/1.1598293
  8. Park, S.H., Lim, T.W., Yang, D.Y., Yi, S.W., Kong, H.J., 'Development of a nano replication printing(nRP) process using a voxel matrix scanning scheme,' The KSPE Autumn Meeting, pp.424-427, 2003
  9. Yi, S.W., Lee, S.K., Kong, H.J., Park, S.H., Jeong, C.G., Lim, T.W., Yang, D.Y., 'Three-dimensional microfabrication with nano resolution using two-photon absorption of femto-second laser,' Optical Society of Korea Summer Meeting, pp.64-65, 2003
  10. Yang, D.Y., Sohn, H.K., 'Principles of recent rapid prototyping processes,' J. of the KSME, Vol.39, No.9, pp.28-31, 2000
  11. Chou, S.Y., Keimel, C., Gu, J., 'Ultrafast and direct imprint of nanostructures in silicon,' Nature, Vol.417, No.20, pp.835-837, 2002 https://doi.org/10.1038/nature00792
  12. Xia, Y. Whitesides, G.M., 'Soft lithography,' Angew. Chem. Int. Ed., Vol.37, pp.550-575, 1998 https://doi.org/10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G
  13. Kong, H.J., Yi, S.W., Lee, S.K., Yang, D.Y., Park, S.H., Lim, T.W., '3-dimensional micro-fabrication using two-photon absorption by femtosecond laser,' Proc. of SPIE, Vol.5342, pp.137-145, 2004 https://doi.org/10.1117/12.524310