Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

A Study on Determination of the Area Function of Nano Indenter Tip with AFM

AFM을 이용한 나노 인덴터 팁의 면적함수 결정에 관한 연구

  • Published : 2004.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

Depth-sensing indentation is wifely used for evaluation of mechanical properties of thin films. It is generally accepted that the most significant source of uncertainty in nanoindentation measurement is the geometry of the indenter tip. Therefore the successful application of the technique requires accurate calibration of the indenter tip geometry. The direct measurement of geometry of a Berkovich indenter was determined using a atomic force microscope. The indentation geometrical calibration of contact area was performed by analyzing the indenter tip profile. The equations of area functions were proposed for nanoscale thin films..

Keywords

References

  1. ISO/CD 14577-1 to -3 ; Metallic material - Instrumented indentation test for hardness and materials parameters
  2. Draft of CEN TC184 : Advanced Technical Ceramics, WG5 : Methods of Test for Ceramics Coatings, WI 121-132: Determination of Hardness and Young's Modulus by Depth Sensing Indentation
  3. Pollock, H.M., Maugis, D. and Barquins, M., 'Characterisation of sub-micrometer surface layers by indentation,' in Microindentati on Techniques in Materials Science and Engineering, ASTM SPT 889, Philadelphia, PA, pp.47-71, 1986
  4. Lu, C.J. and Bogy, D.B., 'The effect of Tip Radius on Nano-indentation Hardness Tests,' Int. J. Solids Strect., Vol. 32, pp. 1759-1770, 1995 https://doi.org/10.1016/0020-7683(94)00194-2
  5. Anthony, C. Fischer-Cripps, 'Nanoindentation,' Springer, pp. 67-69, 2002
  6. MTS, Nano Indenter XP User Manual, MTS Systems Corporation, 2002
  7. Han, J.H. Lee, K.R., Kim, K.S., Lee,S.Y., 'Principal and Applications of Nanoindentation Test,' J. KSPE, Vol. 19, No. 3, pp. 2002
  8. Sneddon, 'The Relation between Load and Penetration in the Axisymmetric Boussinesq Problem for a Punch of Arbitrary Profile,' Int. J. Eng. Sci., Vol. 3, pp. 47-57, 1965 https://doi.org/10.1016/0020-7225(65)90019-4
  9. Albrecht, T.R., Akamine, S., Carver, T.E. and Quate, C.F., J. Vac. Sci. Technol, A8, 3386, 1990 https://doi.org/10.1116/1.576520
  10. McElhaney, K.W., Vlassak, J.J. and W.D. Nix, J. Mater. Res., 13, pp. 1300, 1998 https://doi.org/10.1557/JMR.1998.0185
  11. Oliver, W.C. and Pharr, G.M., 'An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,' J. Mater. Res., Vol. 7, pp. 1564-1583, 1992 https://doi.org/10.1557/JMR.1992.1564
  12. Herrman, K., Jennett, N.M., Wegener, W., Meneve, J. and Seemann, R., 'Progress in determination of the area function of indenters used for nanoindentation,' Thin Solid Films, Vol. 377, pp. 394-397, 2000 https://doi.org/10.1016/S0040-6090(00)01367-5
  13. Antunes, J.M., Cavaleiro, A., Menezes, L.F., Simoes, M.I. and Fernandes, J.V., 'Ultramicrohardness testing procedure with vickers indenter,' Surface and Coatings Technology, Vol. 149, p. 31, 2002 https://doi.org/10.1016/S0257-8972(01)01413-X