References
- Scheer, H.-C., Schulz, H., Hoffmann, T. and Sotomayor Torres, C. M., 'Nanoimprint techniques,' in Handbook of thin film materials Vol. 5, edited by H. S. Nalwa: Academic press, pp. 1-60, 2002
- NTSC, 'National nanotechnology initiative,' 2000
- Peercy, P.S. 'The drive to miniaturization,' Nature, Vol. 406, pp. 1023-1026, 2000 https://doi.org/10.1038/35023223
- Chou, S.Y., Krauss, P.R. and Renstrom, P.J., 'Imprint of sub-25nm vias and trenches in polymers,' Applied Phusics Letter, Vol. 67, pp. 3114-3116, 1996 https://doi.org/10.1063/1.114851
- Haisman, J., Verheijen, M., Van den Heuvel, K. and Van den Berg, J., 'Mold-assisted nanolithography: A process for reliable pattern replication,' J. Vac. Sci. Technol., Vol. B14, pp. 4124-4128, 1996 https://doi.org/10.1116/1.588604
- Kumar, A. and Whitesides, G. M., 'Features of gold having micrometer to centimeter dimensions can be formed through a combination of stmping with an elastomeric stamp and an alkanethiol ,' Appl. Phys. Lett. Vol. 63, pp. 2002-2004, 1993 https://doi.org/10.1063/1.110628
- Gad-el-Hak, M.Eds. The MEMS Handbook, CRC Press, USA, 2002
- Sharpe, W.N., Turner, K.T. and Edwards, R.L., 'Tensile testing of polysilicon,' Experimental Mechanics, Vol. 39, pp. 161-169, 1999 https://doi.org/10.1007/BF02323548
- Yu, M.F., Lourie, O., Dyer, M.J., Moloni, K., Kelly, T.F. and Ruoff, R.S., 'Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load,' Science, Vol. 287, pp. 637-640, 2000 https://doi.org/10.1126/science.287.5453.637
- Haque, M.A. and Saif, M.T.A., 'Application of MEMS force sensors for in situ mechanical characterization of nano-scale thin films in SEM and TEM,' Sensors and Actuators, Vol. A97-98, pp. 239-245, 2002 https://doi.org/10.1016/S0924-4247(01)00861-5
- Haque, M.A. and Saif, M.T.A., 'Mechanical behavior of 30-50 nm thick aluminum films under uniaxial tension,' Scripta Materialia, Vol. 47, pp. 863-867, 2002 https://doi.org/10.1016/S1359-6462(02)00306-8
- Haque, M.A. and Saif, M.T.A., 'Strain gradient effect in nanoscale thin films,' Acta Materialia, Vol. 51, pp. 3053-3061, 2003 https://doi.org/10.1016/S1359-6454(03)00116-2
- Sharpe, W.N., 'An interferometric strain / displacement measurement sustem,' NASA Technical Memorandum 101638, 1989
- Oh, C.S., Sharpe, W.N., Lee, H.J., Ko, S.G., Kim, S.W. and Ahn, H.G., 'Measurement of the mechanical properties of thin polysilicon films using laser interferometry, microvernier and nanoindentation techniques,' APCNDT 2003, Jeju, Korea (to be published in Sensors and Actuator)
- Zhu, Y., Barthelat, F., Labossiere, P.E., Moldovan, N. and Espinosa, H.D., 'Nanoscale displacement and strain measurement,' Proceedings of the 2003 SEM, 2003
- Johnson, K.L., Contact Mechanics, Cambridge University Press, New York, 1985
- Sneddon, I.N., 'The relation between load and penetration in the axisymmetric Boussinesq problem for a punch of arbitrary profile,' International Journal of Engineering Science, Vol. 3, pp. 47-57, 1965 https://doi.org/10.1016/0020-7225(65)90019-4
- Fischer-Cripps, A. C., Nanoindentation, Springer-Verlag, New York, 2002
- Oliver, W.C. and Pharr, G.M., 'An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,' Journal of Materials Research, Vol. 7, pp. 1564-1583, 1992 https://doi.org/10.1557/JMR.1992.1564
- Hur, S., Hong, S.I., Lee, H.J., Han, S.W., Kim, J.H., Kang, J.Y., Choi, B.I. and Oh, C.S., 'Measurements of mechanical properties of thin polymer films by nanoindentation techniques,' APCNDT 2003, Jeju, Korea (to be published in Key Engineering Materials)
- Kim, J.H., Lee, H.J., Ko, S.G., Han, S.W., Hur, S., Choi, B.I., Jeong, J.H. and Lee, E.S., 'Residual thickness estimation of polymeric thin film based on a simplified nanoindentation model,' KSPE 2003 Autumn, Masan, Korea
- Lee, H.J., Hur, S., Ko, S.G., Kim, J.H., Han, S.W. and Choi,B.-I., 'Methods for measuring the thickness of nano-meter sized thin films using indentation test,' Patent pending (Korea), 2003
- Esqinosa, H.D., Prorok, B.C. and Fischer, M., 'A methodology for determining mechanical properties of freestanding thin films and MEMS materials,' Journal of the Mechanics and Physics of Solids, Vol. 51, pp. 47-67, 2003 https://doi.org/10.1016/S0022-5096(02)00062-5
- Kim, J.H., Lee, H.J., Han, S.W., Baek, C.-W., Kim, J.-M. and Kim, Y.-K., 'Mechanical characterization of 100 nm-thick Au thin film using strip bending test,' KSME 2004 spring conference, Kangwondo, Korea, 2004
- http://www.psia.co.kr
- Garcia, R. and Perez, R., 'Dynamic atomic force microscopy methods,' Surface Science Reports, Vol. 47, pp. 197-301, 2002 https://doi.org/10.1016/S0167-5729(02)00077-8
- http://www.bfrl.nist.gov/nanoscience/papers/JAD.html
- VanLandingham, M.R., Villarrubia, J.S. and Meyers, G.G., 'Nanoindentation of polymers: Overview,' Polymer Preprints, Vol. 41, pp. 1412-1413, 2000
- Namazu, T., Isono, Y. and Tanaka, T., 'Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM,' Journal of Microelectromechanical System, Vol. 9, pp. 450-459, 2000 https://doi.org/10.1109/84.896765
- http://www.di.com.
- Lee, H.J., Kim, J.H., Oh, C.-S., Han, S.W., Hur, S., Ko, S.G. and Choi, B.-I., 'AFM cantilever with nanoindentation test functionality,' PCT/KR2004/00018, 2004