Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
권호 표지
DOI QR코드

DOI QR Code

Lattice based Microstructure Evolution Model for Monte Carlo Finite Element Analysis of Polycrystalline Materials

격자식 미세구조 성장 모델을 이용한 다결정 박막 소재의 유한 요소 해석

  • 최재환 (오하이오 주립대, 기계공학과) ;
  • 김한성 (오하이오 주립대, 기계공학) ;
  • 이준기 (오하이오 주립대, 기계공학) ;
  • 나경환 (한국생산기술연구원)
  • Published : 2004.06.01
Download PDF
⟨ Previous Next ⟩

Abstract

The mechanical properties of polycrystalline thin-films, critical for Micro-Electro-Mechanical Systems (MEMS) components, are known to have the size effect and the scatter in the length scale of microns by the numbers of intensive investigation by experiments and simulations. So, the consideration of the microstructure is essential to cover these length scale effects. The lattice based stochastic model for the microstructure evolution is used to simulate the actual microstructure, and the fast and reliable algorithm is described in this paper. The kinetics parameters, which are the key parameters for the microstructure evolution based on the nucleation and growth mechanism, are extracted from the given micrograph of a polycrystalline material by an inverse method. And the method is verified by the comparison of the quantitative measures, the number of grains and the grain size distribution, for the actual and simulated microstructures. Finite element mesh is then generated on this lattice based microstructure by the developed code. And the statistical finite element analysis is accomplished for selected microstructure.

Keywords

References

  1. Meas. Sci. Technol. v.10 Measurement of mechanical properties for MEMS materials T.Yi;C.J.Kim https://doi.org/10.1088/0957-0233/10/8/305
  2. J. MicroElectroMechanical Syst. v.7 no.1 Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin-films T.Tsuchiya;O.Tabata;J.Sakata;T.Yasunori https://doi.org/10.1109/84.661392
  3. Thin Solid Films v.270 Micromechanical properties of amorphous carbon coatings deposited by different deposition techniques B.K.Gupta;B.Bhushan https://doi.org/10.1016/0040-6090(95)06699-3
  4. Acta Materialia v.45 no.6 Monte Carlo simulation of effective elastic constants of polycrystalline thin films R.L.Mullen;R.Ballarini;Y.Yin;A.H.Heuer https://doi.org/10.1016/S1359-6454(96)00366-7
  5. Analog Integrated Circuits and Signal Processing v.39 The atomic limit of finite element modeling in MEMS: Coupling of length scales R.E.Rudd
  6. The Annals of Mathematical Statistics v.33 Random subdivisions of space into crystals E.N.Gilbert https://doi.org/10.1214/aoms/1177704464
  7. J. Appl. Phys. v.50 no.11 Crystallization in amorphous silicon K.Zellama;P.Germain;S.Squelard;J.C.Bourgoin https://doi.org/10.1063/1.325856
  8. Physical Review B v.61 no.10 Lattice model for kinetics and grain-size distribution in crystallization M.Castro;A.Sanchez;F.Dominguez-Adame https://doi.org/10.1103/PhysRevB.61.6579
  9. Philosophical Magazine B v.53 no.5 On the distribution of cell areas in a voronoi network D.Weaire;J.P.Kermode;J.Wejchert https://doi.org/10.1080/13642818608240647
  10. Acta Metallurgica et Materialia v.42 no.11 The scaling state in two-dimensional grain growth P.Mulheran https://doi.org/10.1016/0956-7151(94)90425-1
  11. Models of Spatial Processes A.Getis;B.Boots
  12. Modelling and Simulation in Materials Science and Engineering v.7 The relation between single crystal elasticity and the effective elastic behavior of polycrystalline materials: theory, measurement and computation J.M. den Toonder;J.A.W. van Dommelen;F.P.T.Baaijens https://doi.org/10.1088/0965-0393/7/6/301