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Study on the Water Vapor Permeation Properties of the Inorganic Thin Composite Film for the Passivation Layer in the OLED

유기 EL 보호층으로 적용하기 위한 무기 복합 박막의 투습율 특성 연구

  • 김광호 (한국과학기술연구원 마이크로시스템) ;
  • 이주원 (한국과학기술연구원 마이크로시스템) ;
  • 김영철 (경희대학교 영상정보소제 기술연구센터) ;
  • 주병권 (한국과학기술연구원 마이크로시스템) ;
  • 김재경 (한국과학기술연구원 마이크로시스템)
  • Published : 2004.04.01

Abstract

In this study, we investigated the WVTRs Properties of inorganic thin composite films(ITCFs) to be newly adopted as the passivation layer of the OLED to replace the inorganic compound material Because we thought that inorganic compound materials were limited to enhance the barrier property of thin film. So, ITCFs were fabricated by mixing the cooperated material with the base material. And then, ITCFs were deposited onto the plastic substrate using the electron beam evaporation system and the water vapor transmission rates(WVTRs) were measured using the Mocon equipment. As a result of the WVTR measurement, we could analyze the WVTR values for various ITCFs. ITCFs had a remarkably lower value than the inorganic compound film. Through the analysis of thin film, we can understand the crystal structure and mixed amount. Therefore, ITCFs can be used as the inorganic passivation layers of OLED with the inorganic compound film.

Keywords

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