한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제17권3호
  • /
  • Pages.340-347
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  • 2004
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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고성능의 초소형 RF 칩 인덕터 개발

Development of High-Performance Ultra-small Size RF Chip Inductors

  • 윤의중 (호서대학교 정보제어공학과) ;
  • 천채일 (호서대학교 신소재공학과)
  • 발행 : 2004.03.01
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초록

Ultra-small size, high-performance, solenoid-type RF chip inductors utilizing low-loss A1$_2$O$_3$ core materials were investigated. The dimensions of the RF chip inductors fabricated were 1.0mm${\times}$0.5mm${\times}$0.5mm and copper coils were used. The materials (96％ A1$_2$O$_3$) and shape (I-type) of the core, the diameters (40${\mu}{\textrm}{m}$) and position (middle) of the coil, and the lengths (0.35mm) of solenoid were determined by a high-frequency structure simulator (HFSS) to maximize the performance of the inductors. The high-frequency characteristics of the inductance (L) and quality-factor (Q) of the developed inductors were measured using a RF impedance/material analyzer (E4991A with E16197A test fixture). The developed inductors exhibit an inductance of 11 to 11.3nH and a qualify factor of 22.3 to 65.7 over the frequency ranges of 250 MHz to 1.7 GHz, and show results comparable to those measured for the inductors prepared by Coilcraft$^{TM}$. The simulated data described the high-frequency data of the L and Q of the fabricated inductors well.

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참고문헌

  1. IEEE J. of Solid-State Circuits v.32 no.9 Temperature dependence of Q and inductance in spiral inductors fabricated in a silion-germanium/BiCMOS technology Rob Groves;David L. Harame;Dale Jadus https://doi.org/10.1109/4.628763
  2. IEEE Trans. on Industrial Electronics v.45 no.6 Micromachined planar inductors on silicon wafers for MEMS applications Chong H. Ahn;Mark G. Allen https://doi.org/10.1109/41.735330
  3. IEEE Trans. on Magnetics v.28 no.5 New type micro cloth-inductor and transformer with thin amorphous wires and multi-thin coils Y.Kobayashi;S.Ishibashi;K.Shirakawa;J.Toriu;H.Matsuki;K.Murakami https://doi.org/10.1109/20.179701
  4. Absorption frequency tuning with double layer ferrite stacks V.Joshi;K.Kimura;H.Kiyokawa;J.Norgard;C.Araujo
  5. J. of Magenetism and Magnetic Materials v.168 Low-temperature sintering of Ni-Zn-Cu ferrite and its permeability spectra T.Nakamura https://doi.org/10.1016/S0304-8853(96)00709-3
  6. IEEE Trans. on Magnetics v.33 no.5 High frequency multilayer chip inductors Jen-Yan Hus;Hon-Chin Lin;Hon-Dar Shen;Chi-Jen Chen https://doi.org/10.1109/20.617932
  7. IEEE J. of Solid-State Circuits v.33 no.5 On-chip spiral inductors with patterned ground shields for Si-based RF IC's C. Patrick Yue;S. Simon Wong https://doi.org/10.1109/4.668989
  8. Jpn. J. Appl. Phys. v.39 no.8 Developmen of high-performance solenoid-type RF chip inductors utilizing low-loss Al₂O₃ core materials Myung-Hee Jung;Jae-Wook Kim;Eui-Jung Yun https://doi.org/10.1143/JJAP.39.4772
  9. J. of the Korean Institute of Electrical and Electronic Material Engineers v.13 no.10 A study for solenoid-type RF chip inductors Jae-Wook Kim;Eui-Jung Yun;Young-Chang Jung;Chol-Ho Hong
  10. IEEE IEDM v.98 High-performance electroplated solenoid-type integrated inductor (SI²) for RF applications using simple 3D surfce micromachining technology Jun-Bo Yoon;Bon-Kee Kim;Chul-Hi Han;Eui-Sik Yoon;Kyu-Ro Lee;Choong-Ki Kim
  11. Inductors transformers filters catalog Coilcraft