참고문헌
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- 전기전자재료학회논문지 v.11 no.6 플라즈마 화학기상증착법으로 제작된 Diamond-like carbon 박막의 특성 김종탁
- 전지전자재료학회논문지 v.16 no.1 탄소계 박막의 성장과 특성에 대한 나노 Buffer Layer의 영향 류정탁
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- 대한금속재료학회지 v.33 no.1 ECR-PECVD법으로 증착한 다이아몬드성 카본 박막의 구조와 성질에 미치는 기판 rf 바이어스의 영향 강대환;김기범;김태호;이지화
- J. Vac. Sci. Technol. A5 Characterization of diamondlike carbobn films and their application as overcoasts on thin-film media for magnetic recording H.C.Tsai;D.N.Bogy
- Phys. Rev. B 30 modeling studies of amorphous carbon D.Beeman;J.Silverman;R.Lynds;M.R.Anderson https://doi.org/10.1103/PhysRevB.30.870
- Wear v.249 Tribological properties and adhesive strength of DLC coatings prepared under different substrate bias voltages D.Sheeja;B.K.Tay;S.P.Lau;Xu Shi https://doi.org/10.1016/S0043-1648(01)00541-5
- Muclear Instruments and Methods in Physics Research B v.206 Hydrogen contents and related properties of a-C:H formed with unbalanced magnetron sputtering G.C.Xu;Y.Hibino;K.Kurotobi;Y.Suzuki;M.Iwaki https://doi.org/10.1016/S0168-583X(03)00756-0
- Diamond and Relat. Mater. v.10 Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering V.Kulikovsky;P.Bohac;F.France;A.Deineka;V.Vorlicek;L.Jastrabik https://doi.org/10.1016/S0925-9635(00)00525-2