Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Optimization of Nano Machining Parameters Using Acoustic Emission and the Taguchi Method

음향방출과 다구찌 방법을 이용한 나노머시닝 가공조건의 최적화

  • 이성환 (한양대학교 기계공학과) ;
  • 손정무 (한양대학교 정밀공학과 대학원)
  • Published : 2004.03.01
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Abstract

Atomic force microscope (AFM) techniques are increasingly used fur tribological studies of engineering surfaces at scales ranging from atomic and molecular to micro-scale. Recently, AFM with suitable tips is being used for nano fabrication/nano machining purposes. In this paper, machining characteristics of silicon were investigated by nano indentation and nano scratch. Nano-scale material removal mechanisms are studied and the Taguchi method was introduced to acquire optimum parameters for nano machining. Also, Acoustic Emission (AR) is used for the monitoring of nano machining.

Keywords

References

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