Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Development of 3-axis Fine Positioning Stage: Part 1. Analysis and Design

초정밀 3축 이송 스테이지의 개발: 1. 해석 및 설계

  • 강중옥 (금오공과대학교 대학원 기전공학과) ;
  • 서문훈 (금오공과대학교 대학원 기전공학과) ;
  • 한창수 (한국기계연구원) ;
  • 홍성욱 (금오공대 기계공학부)
  • Published : 2004.03.01
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Abstract

This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs(the flexures hinges). An experimental design procedure is applied to determine the dimension of flexures hinges. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage. An actual fine stage is made and verified through an experiment on the dynamic characteristics.

Keywords

References

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