대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

MEMS 공정에 의해 제작된 PZT 마이크로 켄틸레버의 전기기계적 거동 및 질량에 대한 공진특성 분석

Characterization of Electromechanical Properties and Mass Effect of PZT Microcantilever

  • 황교선 (고려대 공대 전자컴퓨터공학과) ;
  • 이정훈 (연세대 공대 세라믹공학과) ;
  • 박정호 (고려대 공대 전자컴퓨터공학과) ;
  • 김태송 (한국과학기술연구원 마이크로시스템연구센터)
  • 발행 : 2004.02.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

A micromachined self-exited piezoelectric cantilever has been fabricated using PZT(52/48) thin film. For the application to biosensor using antigen-antibody interaction, electromechanical properties such as resonant frequency and quality factor of micromachined piezoelectric cantilever were important factors. Electromechanical properties and resonant behaviors of microfabricated cantilever were simulated by FEA (Finite Element Analysis) using Coventorware$^{TM}$2003. And these characterization of microcantilever were measured by using LDV(Laser Doppler Vibrometer) to compare with FEA data. We present the resonant frequency shift of micromachined piezoelectric cantilevers due to combination of mass loading and change of spring constant by gold deposition. Experimental mass sensitivities of microcantilever were characterized by Au deposition on the backside of microcantilever. Mass sensitivities with $100{\times}300$ ${\mu}{\textrm}{m}$ dimension cantilever from simulation and experimental were 5.56 Hz/ng and 16.8 Hz/ng respectively.y.

키워드

참고문헌

  1. J. Fritz, M.K. Baller, H.P. Lang, H. Rhthuizen, P. Vettiger, E. Meyer, H.-J. Guntherodt, C. Gerber, J.K. Gimzewski, Science 288, 316, 2000 https://doi.org/10.1126/science.288.5464.316
  2. R. Berger, E. Delamarche, H.P. Lang, C. Gerber, J.K. Gimzewski, E. Meyer, H.-J. Guntherodt, Science, 2021, 1997 https://doi.org/10.1126/science.276.5321.2021
  3. Kevin Y. Yasumura, Timothy D. Stowe, Eugene M. Chow and Daniel Rugar, 'Quality factors in micronand submicron-thick cantilever', J. of MEMS, 9, 117-125, 2000 https://doi.org/10.1109/84.825786
  4. S. Wakabayashi, M. Sakata, H. Goto, M. Takeuchi and T. Yada, 'Static characteristics of piezoelectric thin film bulking actuator', Jpn. J. Appl. Phys., 35, 5012-5014, 1996 https://doi.org/10.1143/JJAP.35.5012
  5. Friedrich G. Barth, Joseph A.C. Humphrey, Timothy W. Secomb Sensors and Sensing in Biology and Engineering, Springer WienNew York, 2002
  6. B. Ilic, D. Czaplewski, H. G. Craighead, P. Neuzil, C. Campagnolo and C. Batt, Appl. Phys. Lett. 77, 450, 2000 https://doi.org/10.1063/1.1288672
  7. S. Cherian, T. Thundat, Appl. Phys. Lett. 80, 2219, 2002 https://doi.org/10.1063/1.1435802
  8. G. Wu, R. H. Datar, K. M. Hansen, T. Thundat, R. J. Cote, and A. Majumdar, Nature biotechnology 19, 856, 2001 https://doi.org/10.1038/nbt0901-856
  9. A. K. Kaw, Mechanics of composite materials, CRC, 1997
  10. Suman Cherian and Thomas Thundat, Appl. Phys. Lett. vol 80, No.12, 2002