ICROS (제어로봇시스템학회지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
권호 표지

나노기술의 MEMS 응용

  • Published : 2004.01.01
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Abstract

Keywords

References

  1. Proc. IEEE MEMS 2001 SAMs meet MEMS:surface modification with self-assembled monolayers for the dry-demolding of photoplastic MEMS/NEMS B.J.Kim;G.M.Kin;M.Liebau;J.Huskens;D.N.Reinhoudt;J.Brugger
  2. 대한화학회 제89회 학술발표회 Enhancement in Bonding Strength of Metal Thin-Film Micropatterns on PDMS using Self-Assembled Monolayers 박용민;노경원;박노경;임관섭;김진호;한종훈
  3. Proc. IEEE MEMS Focused Ion Beam (FIB) Nano-Machining and FIB Moire Technique for Strain Analysis in MEMS/NEMS Structures and Devices B.Li;X.Tang;H.Xie;X.Zhang
  4. National Science and Technology Council (NTSC) report Nanostructure Science and Technology R.W.Siegel;E.Hu;M.C.Roco
  5. Science v.283 Dip-Pen Nanolithography R.D.Piner;J.Zhu;F.Xu;S.Hong;C.A.Mirkin
  6. Journal of Applied Physics Patterning of silicon surfaces with noncontact atomic force microscopy:Field-induced formation of nano-meter-size water bridges Ricardo Garcia;Montserrat, Calleja
  7. 기계저널 v.43 no.3 나노세계의 눈과 손:원자현미경 기술 박강호
  8. Proc. IEEE MEMS 2001 Fabrication of Micro Power Source (MPS) using Micro Direct Methanol Fuel Cell (μDMFC) for the Medical Application W.Y.Sim;G.Y.Kim;S.S.Yang
  9. Proc. IEEE MEMS 2003 A Miniature Direct Methanol Fuel Cell using Platinum Sputtered Microcolumn Electrodes with Limited Amount of Fuel Y.H.Seo;Y.H.Cho
  10. Proc. IEEE MEMS 2003 Silicon-based Micro-polymer Electrolyte Fuel Cells K.B.Min;S.Tanaka;M.Esashi
  11. Physica B v.323 Preparation of fine platinum catalyst supported on single-wall carbon nanohorns for fuel cell application T.Yoshitake;Y.Shimakawa;S.Kuroshima;H.Kimura;T.Ichihashi;Y.Kubo;D.Kasuya;K.takahashi;F.Kokai;M.Yudasaka;S.Iijima
  12. NEC annual environmental report 2002
  13. Applied Physics Letters v.72 no.22 A nanotube-based field-emission flat panel display Q.H.Wang;A.A.Setlur;J.M.Lauerhaas;J.Y.Dai;E.W.Seelig;R.P.H.Chang
  14. Proc. IEEE MEMS 2003 Gated field emitter using carbon nanotubes for vacuum microelectronic devices Y.T.Jang;C.H.Choi;B,K.Ju;J.H.Ahn;Y.H.Lee
  15. Proc. IEEE MEMS 2003 Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensing Victor,T.S.;Wong, Wen J. Li
  16. Journal of MEMS v.8 no.1 A Micromachine Flow Shear-Stress Sensor Based on Thermal Transfer Principle C.Liu;J.B.Huang;Z.Zhu;F.Jiang;S.Tung;Y.C.Tai;C.M.Ho