Journal of information and communication convergence engineering

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
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Dependence of Resonance Characteristics on Thermal Annealing in ZnO-Based FBAR Devices

  • Published : 2004.03.01
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Abstract

In this paper, we present the film bulk acoustic resonator (FBAR) devices fabricated by considering the effects of annealing temperature on zinc oxide (ZnO) film growth characteristics. In order to determine the annealing temperature and annealing time at which the ZnO film can have good material properties, the several resonators containing ZnO layers were fabricated and annealed at various temperatures from $27^{\circ}C\;to\;300^{\circ}C$ in Ar gas ambient. The effects of the annealing temperature and annealing time on the ZnO film properties were comprehensively studied in order to further improve the resonance characteristics of FBAR resonators.

Keywords

References

  1. R. Ruby, and P. Merchant, 'Micromachined Thin Film Bulk Acoustic Resomators', IEEE International Frequency Control Symposium, pp. 135-138, 1994
  2. Qing-Xin Su, Paul Kirby, Eiju Komuro, Masaaki Imura, Qi Zhang, and Roger Whatmore, 'Thin-Film Bulk Acoustic Resonators and Filters Using ZnO and Lead-Zirconium-Titanate Thin Films', IEEE Transactions on Microwave Theory and Techniques, Vol. 49, No. 4, pp. 769-778, 2001 https://doi.org/10.1109/22.915462
  3. J. Kaitila, M. Yliammi, and J. Molarius, 'ZnO Based Thin Film Bulk Acoustic Wave Filters for EGSM Band', IEEE Ultrasonics Symposium, pp. 803-806, 2001
  4. Mai Linh, M. Yim, D. Kim, G. Yoon, 'Cobalt (Co) Electrode FBAR Devices Fabricated on Seven-Layerrd Bragg Reflectors and Their Resonance Characteristics' KIMICS' Int. J. Vol. 1, No. 3, Sep. 2003
  5. Tao Xu, Guoying Wu, Guobine Zhang, Yilong Hao, 'The compatibility of ZnO piezoelectric film with micromachining process', Sensors and Actuators A, Vol. 104 p.61-67, 2003 https://doi.org/10.1016/S0924-4247(02)00484-3
  6. K. M. Lakin, G. R. Kline and K. T. McCarron 'High-Q Microwave Acoustic Resonators and Filters', IEEE Trans. Microwave Theory & Tech. 41, pp. 2139-2146, 1993 https://doi.org/10.1109/22.260698
  7. Joseph J. Lutsky, Rajan S. Naik, Rafael Rief and Charles G. Sodini, 'A Sealed Cavity TFR Process for RF Bandpass Filters', IEEE IEDM 96, pp. 95-98, 1996
  8. S. Park, B. Seo, H. Park, G. Yoon, 'Film Bulk Acoustic Resonator Fabrication for Radio Frequency Filter Applications', Jpn. J. Appl. Phys. Vol. 39, pp. 4115-4119. 2000 https://doi.org/10.1143/JJAP.39.4115