초록
A study on the particle growth in $TEOS/O_2$ plasma was performed by observing the particle size and its morphology by TEM. The qualitative chemical analysis of particles was also determined by the EDS (Energy Dispersive X-Ray Spectrometer). The effects of process variables such as the plasma on-time and bubbler temperature on the particle growth were investigated. The particle size becomes larger as the plasma on-time because of the longer coagulation, and also as the bubbler temperature increases because of the faster coagulation between particles.