동력기계공학회지 (Journal of Power System Engineering)
- 제7권3호
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- Pages.69-73
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- 2003
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- 2713-8429(pISSN)
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- 2713-8437(eISSN)
압전체로 구동되는 질량흐름 제어기에서 레이놀즈 방정식을 이용한 유량 특성 연구
A Study of Flow Characteristics using Reynold's Equation on Mass Flow Controller Actuated by Piezoelectric Material
초록
In this paper, the relation between displacement of piezoelectric disk and electric field was proposed. From Navier-Stokes equation and Reynold's equation, the relation between flow and gap of plate was determined. This models were further verified by experiments. Based on theoretical study and experimental verification, the proposed model between flow rate and voltage can be used in the design of mass flow controller in gas supplying system.
키워드