DOI QR코드

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Anti-Reflection Properties of In-Situ Doped Spin-On Film

  • U. Gangopadhyay (School of Electrical and Computer, Engineering, Sungkyunkwan University) ;
  • Kim, Kyung-Hae (School of Electrical and Computer, Engineering, Sungkyunkwan University) ;
  • Park, J.H. (School of Electrical and Computer, Engineering, Sungkyunkwan University) ;
  • S.K. Dhungel (School of Electrical and Computer, Engineering, Sungkyunkwan University) ;
  • D. Mangalaraj (School of Electrical and Computer, Engineering, Sungkyunkwan University) ;
  • J. Yi (School of Electrical and Computer, Engineering, Sungkyunkwan University) ;
  • H. Saha (Department of Electronics and Tele-communication Engineering, Jadavpur University) ;
  • Kim, D.W. (Samsung SDI Co. Ltd., Corporate R&D Center, Yongin City)
  • 발행 : 2003.12.01

초록

Anti-reflection properties of post diffusion doped spin-on source (in-situ AR coating) have been investigated in some detail. A simple experiment for reflectivity study using oblique incidence of light and necessary modification of the theory of minimum reflectivity at oblique incidence has been established. The comparative study of the in-situ AR coating with available spin-on AR film on silicon Solar Cell Surface have been investigated.

키워드

참고문헌

  1. Martin A. Green, 'Solar Cells Operating Principles, Technology, and System Applications', Prentice-Hall, p. 164, 1982
  2. J. Zhao and M. A. Green, 'Optimized antireflection coating for high efficiency silicon solar cells', IEEE Trans. Electron Dev., Vol. 38, No. 8, p. 1925, 1991 https://doi.org/10.1109/16.119035
  3. Armin G. Aberle, 'Overview on SiN surface passivation of crystalline silicon solar cells', Solar Energy Materials and Solar Cells, Vol. 65, No. 1-4, p.239, 2001 https://doi.org/10.1016/S0927-0248(00)00099-4
  4. L. Pirozzi, G. Arabito, F. Artuso, V. Barbarossa, U. Bessi Vetrella, S. Loreti, P. Mangiapane, and E. Salza, 'Selective emitters in buried contact silicon solar cells: Some low cost solutions', Solar Energy Materials and Solar Cells, Vol. 65, No. 1-4, p. 287, 2001 https://doi.org/10.1016/S0927-0248(00)00104-5
  5. S. Bourdais, G. Beaucarne, A. Slaoui, J. Poortmans, B. Semmache, and C. Dubois, 'Comparative study of rapid and classical thermal phosphorus diffusion on polycrystalline silicon thin films', Solar Energy Materials and Solar Cells, Vol. 65, No. 1-4, p. 487, 2001 https://doi.org/10.1016/S0927-0248(00)00131-8
  6. U. Gangopadhyay, H. Saha, and S. K. Lahih, 'Spinon diffusion for silicon solar cell fabrication', J.IETE, Vol. 36, No. 6, p. 450, 1998
  7. A. Rohatgi, Z. Chen, P. Doshi, T. Pham and D. Ruby, 'High efficiency silicon solar cells by RTP', Appl. Phys. Lett., Vol. 65, No. 16, P. 2087, 1994 https://doi.org/10.1063/1.112801
  8. L. Ventura, A. Slaoui, B. Hartiti, J. C. Muller, F. Stuck, and P. Siffert 'Shallow junction formation by rapid thermal diffusion into silicon from dopedspin on glass films', Proc. 1994 Matehals ResearchSociety symposia, Vol. 342, p. 345, 1994
  9. F. C. Marques, J. Urdanivia, and I. Chambouleyron, 'A simple technology to improve crystalline silicon solar cell efficiency', Solar Energy Materials and Solar Cells, Vol. 52, No. 3-4, P. 285, 1998 https://doi.org/10.1016/S0927-0248(97)00242-0
  10. Anzhong Lin, Xuejian Wong, Youxin Li, and Liande Chou, 'Passivation and gettehng of defective crystalline silicon solar cell', Solar EnergyMaterials and Solar Cells, Vol. 62, No. 1-2, p. 149, 2000 https://doi.org/10.1016/S0927-0248(99)00146-4
  11. Paul H. Smith, 'A theoretical and experimentalanalysis of the ellipsometer', Surface Science, Vol. 16,P.34,1969 https://doi.org/10.1016/0039-6028(69)90004-1
  12. Carl A. Fenstermaker and Frank L. McCrackin 'Errors arising from surface roughness in ellipsometric measurement of the refractive index of a surface', Vol. 16, p. 85, 1969 https://doi.org/10.1016/0039-6028(69)90007-7
  13. G. E. Jellison Jr. and R. F. Wood, 'Antireflection coatings for planar silicon solar cells', Solar Energy Materials and Solar Cells, Vol. 18, No. 2, p. 93, 1986
  14. Y. C. M Yeh, F. P. Emest, and R. J. Stirn, 'Practical antireflection coatings for metal-semiconductor solar cells', J.Appl. Phys., Vol. 47, p. 4107, 1976 https://doi.org/10.1063/1.323270