Abstract
Both $LiNbO_3$ and $KTiOPO_4$ samples were implanted with 350 keY $H^+$ and $He^+$ ions at different doses ranging from $1 ${\times}$\times10^{16}$ to of $5 ${\times}$\times10^{16}$ ions/$\textrm{cm}^2$. Single and multi-energy implantations were performed at room temperature. Mono-mode or a few modes in both $LiNbO_3$ and $KTiOPO_4$ waveguides were observed. The effect of temperature on the refractive index profiles of $LiNbO_3$ and $KTiOPO_4$ waveguids was studied. The temperature covered from room temperature, $200^{\circ}C$, 194.5 K (dry ice) and 77K (liquid nitrogen). Different mechanisms are needed to interpret the observed behavior. A n, increased mono-mode $LiNbO_3$ waveguide was formed by multi-energy keV $He^+$ ions.