참고문헌
- Avouris, Ph., Hertel, T., and Martel, R., 1997, "Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication," Appl. Phys. Lett., Vol. 2, pp. 285-287.
- Sasa, S., Ikeda. T., Kajiuci, A., and Inoue, M., 1998, "AFM fabrication and characterization of InAs/AlGaSb nanostructures," Solid-State Electroni-cs, Vol. 42, No. 7-8, pp. 1069-1073. https://doi.org/10.1016/S0038-1101(97)00303-1
- Moon, W.C., Yoshinobu, T., and Iwasaki, H., 1999, "Fabrication of nanopit arrays on Si (111)," Jpn. J. Appl. Phys., Vol. 38, pp. 483-486. https://doi.org/10.1143/JJAP.38.483
- Sohn, L.L., Willet, R.L., 1995, "Fabrication of nanostructures using an atomic force microscopebased lithography," Appl, Phys. Lett., Vol. 67, pp. 1552-1554. https://doi.org/10.1063/1.114731
- Campell, P.M., Snow, E.S., 1999, "Proximal probebased fabrication of nanometer-scale devices," Proc. SPIE-Intl. Soc. Optical Engr., 3975, pp. 943-948.
- Ashida, K., Chen, L., and Morita, N., 2001, "New Maskless micro-fabrication technique of singlecrystal silicon using the combination of nanometerscale machining and wet Etching," Proc. of 2nd euspen Int. Conf. 2001, Turin, Italy, May, pp. 78-81.
- Ashida, K., Morita, N., and Shosida, Y., 2001, "Study on nano-machining process using mechanism of a friction force microscope," JSME International Journal, Series C, Vol. 44, No. 1, pp. 244-260. https://doi.org/10.1299/jsmec.44.244
- 정준호, 신영재, 이응숙, 황경현, 2003, "나노임 프린트리소그래피 기술동향," 한국정밀공학회 지, 제 20 권, 제 3 호, pp. 15-22.
- Chou S.Y., Krauss P.R., Renstrom P.J., 1995, "Imprint of sub-25 nm vias and trenches in polymers," Appl Phys Lett., Vol. 67, No.21, pp. 3114-3116. https://doi.org/10.1063/1.114851
- Chou S.Y., Krauss P.R., 1997, "Imprint lithography with sub-10nm feature size and high throughput," Microelectronic Engineering, Vol. 35, pp. 237-240. https://doi.org/10.1016/S0167-9317(96)00097-4
- 허철, 박성주, 1998, "수소원자로 passivation 된 Si (100) 표면위에 AFM 을 이용한 나노크기의 패턴형성에 관한 연구," 한국물리학회지, 제 11 권, 3 호, pp. 370-374.
- Blacley, W.S., Scattergood, R.O., 1990, "Crystal orientation dependence of machining damage – A Stress Model," J. Am. Ceram. Soc., Vol. 73, No 10, p. 3113. https://doi.org/10.1111/j.1151-2916.1990.tb06730.x
- Shibata, T., Fuji, S., Makino, E., and Ikeda, M., 1996, "Ductile-regime Turning Mechanism of Single-crystal Silicon," Jpn. Prec. Eng., Vol. 18, No 2/3, p. 130.
- Yan, J., Syoji, K., Suzuki, H., and Kuriyagawa, T., 1998, "Ductile Regime Turning of single Crystal Silicon with a Straight-Nosed Diamond Tool", Jpn Prec. Eng., Vol. 64, No. 9, p. 1345. https://doi.org/10.2493/jjspe.64.1345
- Miyake, S. and Kim, J., 1999, "Microprotuberance Processing of Silicon by Diamond Tip Scanning," Jpn. Prec. Eng., Vol. 65, No. 12, pp. 1788-1792. https://doi.org/10.2493/jjspe.65.1788
- Lu, C.J. and Bogy, D.B., 1995, "The effect of tip radius on nano-indentation hardness tests," Int. J. Solids Structures, Vol. 32, No. 12, pp. 1759-1770. https://doi.org/10.1016/0020-7683(94)00194-2
- Morita, N., 2001, "Micro-fabrication technique of single crystal silicon by using combination of nanoscale machining and alkaline etching," J. of the JSGE, Vol. 45, No. 6, pp. 275-278.