Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
권호 표지
DOI QR코드

DOI QR Code

A Study on the Nano-Deformation Behaviors of Single Crystal Silicon and Amorphous Borosilicate Considering the Mechanochemical Reaction

기계화학적 반응을 고려한 단결정 실리콘과 비정질 보로실리케이트의 나노 변형 거동에 관한 연구

  • 윤성원 (부산대 정밀기계공학과 대학원) ;
  • 신용래 (부산대 정밀기계공학과 대학원) ;
  • 강충길 (부산대 기계공학부)
  • Published : 2003.11.01
Download PDF
⟨ Previous Next ⟩

Abstract

Nanomachining process, static nanoplowing, is one of the most promising lithographic technologies in terms of the low cost of operation and variety of workable materials. In nanomachining process, chemical effects are more dominant factor compared with those by physical deformation or fracture. For example, during the nanoscratch on a silicon surface in the atmosphere, micro protuberances are formed due to the mechanochemical reaction between diamond tip and the surfaces. On the contrary, in case of chemically stable materials, such as ceramic or glass, surface protuberances are not formed. The purpose of this study is to understand effects of the mechanochemical reaction between tip and surfaces on deformation behaviors of hard-brittle materials. Nanometerscale elasoplastic deformation behavior of single crystal silicon (100) was characterized with micro protuberance phenomena, and compared with that of borosilicate (Pyrex glass 7740). In addition, effects of the silicon protuberances on nanoscratch test results were discussed.

Keywords

References

  1. Avouris, Ph., Hertel, T., and Martel, R., 1997, "Atomic force microscope tip-induced local oxidation of silicon: kinetics, mechanism, and nanofabrication," Appl. Phys. Lett., Vol. 2, pp. 285-287.
  2. Sasa, S., Ikeda. T., Kajiuci, A., and Inoue, M., 1998, "AFM fabrication and characterization of InAs/AlG aSb nanostructures," Solid-State Electronics, Vol. 42, No. 7-8, pp. 1069-1073. https://doi.org/10.1016/S0038-1101(97)00303-1
  3. Moon, W.C., Yoshinobu, T., and Iwasaki, H., 1999, "Fabrication of nanopit arrays on Si (111)," Jpn. J. Appl. Phys., Vol. 38, pp. 483-486. https://doi.org/10.1143/JJAP.38.483
  4. Chang, W.S., Shin, B.S., Whang, K.H., 2003, "Nanoprobe Application Technologies," J. of Korean Society of Pre. Eng., Vol. 20, No. 3, pp. 5-14.
  5. Sohn, L.L., Willet, R.L., 1995, "Fabrication of nanostructures using an atomic force microscopebased lithography," Appl, Phys. Lett., Vol. 67, pp. 1552-1554. https://doi.org/10.1063/1.114731
  6. Ashida, K., Chen, L., and Morita, N., 2001, "New Maskless micro-fabrication technique of singlecrystal silicon using the combination of nanometerscale machining and wet Etching," Proc. of 2nd euspen Int. Conf. 2001, Turin, Italy, May, pp. 78-81.
  7. Ashida, K., Morita, N., and Shosida, Y., 2001, "Study on nano-machining process using mechanism of a friction force microscope," JSME International Journal, Series C, Vol. 44, No. 1, pp. 244-260. https://doi.org/10.1299/jsmec.44.244
  8. 김영규, 이동철, 강신일, 2003, "나노패턴 성형을 위한 금속 나노 스탬퍼 제작," 한국소성가공학회 춘계학술대회 논문집, pp. 481-484.
  9. 三宅正二郞, 秋山幸弘, 宮琦俊行, 1997, "シリ コンの水による臨界條件下の磨耗損傷と接觸 應力の關係," 日本機械學會論文集 (C 編), Vol. 63, No. 614, p. 266.
  10. Ando, Y., Kaneko, R., 1995, "Microwear Process," Proc. Int. Tribology Conf., Yokohama, p. 1913.
  11. Miyake, S. and Kim, J., 1999, "Microprotuberance Processing of Silicon by Diamond Tip Scanning," Jpn. Prec. Eng., Vol. 65, No. 12, pp. 1788-1792. https://doi.org/10.2493/jjspe.65.1788
  12. 허철, 박성주, 1998, "수소원자로 passivation 된 Si (100) 표면위에 AFM 을 이용한 나노크기의 패턴형성에 관한 연구," 한국물리학회지, 제 11 권, 3 호, pp. 370-374.
  13. Campell, P.M. and Snow, E.S., 1999, "Proximal probe-based fabrication of Nanometer-scale devices," Proc. SPIE-Intl. Soc. Optical Engr., 3975, pp. 943-948.
  14. Blacley, W.S., Scattergood, R.O., 1990, “Crystal orientation dependence of machining damage – A Stress Model,” J. Am. Ceram. Soc., Vol. 73, No 10, p. 3113. https://doi.org/10.1111/j.1151-2916.1990.tb06730.x
  15. Shibata, T., Fuji, S., Makino, E., and Ikeda, M., 1996, “Ductile-regime Turning Mechanism of Single-crystal Silicon,” Jpn. Prec. Eng., Vol. 18, No 2/3, p. 130.
  16. Yan, J., Syoji, K., Suzuki, H., and Kuriyagawa, T., 1998, “Ductile Regime Turning of single Crystal Silicon with a Straight-Nosed Diamond Tool”, Jpn Prec. Eng., Vol. 64, No. 9, p. 1345. https://doi.org/10.2493/jjspe.64.1345
  17. Koshimizu, S., Otsuka, J., 1998, “Microindentation tests of single crystal silicon – Microdeformation Behavior and measurement of ductile to brittle transition”, Jpn. Prec. Eng., Vol. 64, No. 11, pp.1643-1647. https://doi.org/10.2493/jjspe.64.1643

Cited by

  1. Properties of Polysiloxane Coated Borosilicate Lining Blocks vol.54, pp.6, 2017, https://doi.org/10.4191/kcers.2017.54.6.06